M
M. Post
Publications - 1
Citations - 13
M. Post is an academic researcher. The author has contributed to research in topics: Thin film & Microheater. The author has an hindex of 1, co-authored 1 publications receiving 13 citations.
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High-temperature gas sensor using perovskite thin films on a suspended microheater
O. Grudin,R. Marinescu,L. M. Landsberger,M. Kahrizi,G. Frolov,J. D. N. Cheeke,S. Chehab,M. Post,J. Tunney,Xiaomei Du,D. Yang,D. Segall +11 more
TL;DR: Suspended microstructures consisting of a thin oxide/nitride diaphragm with embedded polysilicon heaters were designed and fabricated using a standard complementary metaloxide-semiconductor process and simple postprocessing as mentioned in this paper.