Microfabricated integrated circuits revolutionized computation by vastly reducing the space, labor, and time required for calculations. Microfluidic systems hold similar promise for the large-scale automation of chemistry and biology, suggesting the possibility of numerous experiments performed rapidly and in parallel, while consuming little reagent. While it is too early to tell whether such a vision will be realized, significant progress has been achieved, and various applications of significant scientific and practical interest have been developed. Here a review of the physics of small volumes (nanoliters) of fluids is presented, as parametrized by a series of dimensionless numbers expressing the relative importance of various physical phenomena. Specifically, this review explores the Reynolds number Re, addressing inertial effects; the Peclet number Pe, which concerns convective and diffusive transport; the capillary number Ca expressing the importance of interfacial tension; the Deborah, Weissenberg, and elasticity numbers De, Wi, and El, describing elastic effects due to deformable microstructural elements like polymers; the Grashof and Rayleigh numbers Gr and Ra, describing density-driven flows; and the Knudsen number, describing the importance of noncontinuum molecular effects. Furthermore, the long-range nature of viscous flows and the small device dimensions inherent in microfluidics mean that the influence of boundaries is typically significant. A variety of strategies have been developed to manipulate fluids by exploiting boundary effects; among these are electrokinetic effects, acoustic streaming, and fluid-structure interactions. The goal is to describe the physics behind the rich variety of fluid phenomena occurring on the nanoliter scale using simple scaling arguments, with the hopes of developing an intuitive sense for this occasionally counterintuitive world.

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Microfluidics: Fluid physics at the nanoliter scale

Electrowetting has become one of the most widely used tools for manipulating tiny amounts of liquids on surfaces. Applications range from 'lab-on-a-chip' devices to adjustable lenses and new kinds of electronic displays. In the present article, we review the recent progress in this rapidly growing field including both fundamental and applied aspects. We compare the various approaches used to derive the basic electrowetting equation, which has been shown to be very reliable as long as the applied voltage is not too high. We discuss in detail the origin of the electrostatic forces that induce both contact angle reduction and the motion of entire droplets. We examine the limitations of the electrowetting equation and present a variety of recent extensions to the theory that account for distortions of the liquid surface due to local electric fields, for the finite penetration depth of electric fields into the liquid, as well as for finite conductivity effects in the presence of AC voltage. The most prominent failure of the electrowetting equation, namely the saturation of the contact angle at high voltage, is discussed in a separate section. Recent work in this direction indicates that a variety of distinct physical effects?rather than a unique one?are responsible for the saturation phenomenon, depending on experimental details. In the presence of suitable electrode patterns or topographic structures on the substrate surface, variations of the contact angle can give rise not only to continuous changes of the droplet shape, but also to discontinuous morphological transitions between distinct liquid morphologies. The dynamics of electrowetting are discussed briefly. Finally, we give an overview of recent work aimed at commercial applications, in particular in the fields of adjustable lenses, display technology, fibre optics, and biotechnology-related microfluidic devices.

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Electrowetting: from basics to applications

The current status of lithium-niobate external-modulator technology is reviewed with emphasis on design, fabrication, system requirements, performance, and reliability. The technology meets the performance and reliability requirements of current 2.5-, 10-, and 40-Gb/s digital communication systems, as well as CATV analog systems. The current trend in device topology is toward higher data rates and increased levels of integration. In particular, multiple high-speed modulation functions, such as 10-Gb/s return-to-zero pulse generation plus data modulation, have been achieved in a single device.

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A review of lithium niobate modulators for fiber-optic communications systems

The issues involved in integrating multiple sensors into the operation of a system are presented in the context of the type of information these sensors can uniquely provide. A survey is provided of the variety of approaches to the problem of multisensor integration and fusion that have appeared in the literature in recent years ranging from general paradigms, frameworks, and methods for integrating and fusing multisensory information to existing multisensor systems used in different areas of application. General multisensor fusion methods, sensor selection strategies, and world models are examined, along with approaches to the integration and fusion of information from combinations of different types of sensors. Short descriptions of the role of multisensor integration and fusion in the operation of a number of existing mobile robots are provided, together with proposed high-level multisensory representations suitable for mobile robot navigation and control. Existing multisensor systems for industrial and other applications are considered. >

Multisensor integration and fusion in intelligent systems

This paper deals with electrowetting (EW) and electrowetting-on-dielectric (EWOD) principles applied to microfluidic devices. EW and EWOD are principles that can control wettability of liquids on solid surfaces using electric potential. While EW is controlling wettability of a certain electrolyte on a metal electrode by varying electric energy across the electrical double layer (EDL), EWOD applies to virtually any aqueous liquid by varying electric energy across the thin dielectric film between the liquid and conducting substrate. These driving mechanisms have many advantages. By electrically changing the wettability of each of the electrode patterns on a surface, a liquid on these electrodes can be shaped and driven along the active electrodes, making microfluidics extremely simple both for device fabrication and operation. It is also worth noting that, driven by surface tension, the mechanism becomes more effective as the size of the device becomes smaller. This paper describes fundamental concepts and the proof-of-concept experiments, modeling and design, microfabrication processes, and initial testing results for the microfluidic devices based on the EW and EWOD principles.

Electrowetting and electrowetting-on-dielectric for microscale liquid handling

We describe the fabrication and characterization of optical waveguides formed in LiNbO3 by proton exchange in benzoic acid melts at 200–250 °C. Proton exchange, in LiNbO3 the replacement of lithium ions with protons, takes place when the substrate is immersed in the molten acid. We observe a surface increase in the refractive index of 0.12, for the extraordinary polarization only, with a step function index profile. This is the highest index increase obtainable to date for LiNbO3. Measured diffusion rates for x‐cut crystals are 1.37 μm2/h at T = 249 °C and 0.37 μm2/h at T = 217 °C, so that very deep guides can be formed in short times. Diffusion is somewhat slower in the z direction. The process as described is not useful for y‐cut crystals, since it damgaes this surface. Losses, measured on x‐cut samples, were <0.5 dB/cm. All measurements were made at 0.633 μm.

Proton exchange for high‐index waveguides in LiNbO3

We introduce a new electrowetting effect, continuous electrowetting (CEW), and show its advantages for applications to displays and other electro‐optic devices. We demonstrate experimentally, by using CEW, fast and reversible electrowetting flow on the theoretically predicted scale of ∼10 cm/s for ∼1‐V driving voltage.

Continuous electrowetting effect

The photorefractive effect (‘‘optical damage’’) severely limits the application of LiNbO3 in visible wavelengths We have found that proton exchanged LiNbO3, in which up to 70% of the Li ions are replaced by protons, exhibit no measurable index change with average intensities of visible light up to 5 kW/cm2 or peak pulse intensities of ∼5×108 W/cm2 in the guide These experiments demonstrate that the photorefractive sensitivity of proton exchanged waveguides is at least four orders of magnitude lower than that of conventional titanium diffused guides Similar results are obtained with titanium diffused waveguides which are subsequently proton exchanged

Damage‐resistant LiNbO3 waveguides

We describe a means of eliminating undesired surface guiding in titanium‐diffused strip waveguides on LiNbO3. Surface guiding for light of the extraordinary polarization, normally produced when the crystal is diffused in dry argon or oxygen, can be eliminated entirely by adding water vapor to the diffusion gases. Infrared absorption measurements show that hydrogen enters crystals diffused in a wet atmosphere. Although the mechanism for the prevention of surface guiding is not fully understood, we suggest that the presence of excess hydrogen reduces lithium mobility.

Elimination of out‐diffused surface guiding in titanium‐diffused LiNbO3

Continuous electrowetting (CEW) and refractive index matching have been used as the physical basis of an optical switch for multimode fibers This switch has low cross talk (∼−30 dB), fast response times (∼20 ms), low operating voltage (∼1 V), and low power consumption (∼1 μW)

J. L. Jackel

Papers

Proton exchange for high‐index waveguides in LiNbO3

Continuous electrowetting effect

Damage‐resistant LiNbO3 waveguides

Elimination of out‐diffused surface guiding in titanium‐diffused LiNbO3

Electrowetting optical switch