J
J.M. Bustillo
Researcher at University of California, Berkeley
Publications - 2
Citations - 787
J.M. Bustillo is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: Microelectromechanical systems & Fabrication. The author has an hindex of 2, co-authored 2 publications receiving 770 citations.
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Journal ArticleDOI
Surface micromachining for microelectromechanical systems
TL;DR: Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films as discussed by the authors, which typically requires that they be freed from the planar substrate.
Proceedings ArticleDOI
Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments
TL;DR: In this paper, a new technique for providing both electrical isolation and embedded interconnect to SOI-based, single crystal silicon, inertial sensors is described, which allows fabrication of high-aspect-ratio, in-plane, capacitive sensors with improved sensitivity suitable for integration with on-chip electronics.