J
Jan Leština
Publications - 1
Citations - 73
Jan Leština is an academic researcher. The author has contributed to research in topics: Pulse duration & Thin film. The author has an hindex of 1, co-authored 1 publications receiving 64 citations.
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Pulsed dc magnetron discharge for high-rate sputtering of thin films
TL;DR: In this article, the specific behavior of a pulsed magnetron discharge was analyzed and the time development of pulsed discharge was composed of three regimes of operation: (1) plasma buildup, (2) stationary plasma, and (3) decaying plasma when the pulse power is off.