J
Jeff Seaman
Researcher at Cree Inc.
Publications - 6
Citations - 103
Jeff Seaman is an academic researcher from Cree Inc.. The author has contributed to research in topics: Dislocation & Wafer. The author has an hindex of 4, co-authored 6 publications receiving 83 citations.
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Ultra-Fast SiC Wafer Surface Roughness Mapping
TL;DR: In this paper, a new surface roughness measurement method using differential interference contrast (DIC) microscopy image was proposed, which was compared with white-light interference measurement system and a good correlation was confirmed.