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Showing papers by "Joanna Schmit published in 2007"


Journal ArticleDOI
TL;DR: In this paper, the exiting beams of the Mirau interference microscope are orthogonally polarized, which makes it possible to introduce achromatic phase shifts in the two beams, facilitating the use of the interferometer for white-light phase-shifting interference microscopy.
Abstract: The Mirau interference microscope features a very compact interferometer incorporated in a single microscope objective. We describe a simple modification that results in the exiting beams being orthogonally polarized. This modification makes it possible to introduce achromatic phase shifts in the two beams, facilitating the use of the Mirau interferometer for white-light phase-shifting interference microscopy.

19 citations


Patent
Florin Munteanu1, Joanna Schmit1
13 Jul 2007
TL;DR: In this paper, an error function based on the difference between actual intensities produced by interferometry and the intensities predicted by the equation is minimized iteratively with respect to the parameters.
Abstract: An interferometric intensity equation includes parameters that depend on bandwidth and numerical aperture. An error function based on the difference between actual intensities produced by interferometry and the intensities predicted by the equation is minimized iteratively with respect to the parameters. The scan positions (i.e., the step sizes between frames) that minimized the error function are then used to calculate the phase for each pixel, from which the height can also be calculated in conventional manner. As a result, the phase map generated by the procedure is corrected to a degree of precision significantly better than previously possible.

8 citations