Showing papers by "Joel Nuno Pinto Borges published in 2011"
TL;DR: In this article, the electrical behavior of chromium oxynitride thin films, deposited by DC reactive magnetron sputtering, was investigated and correlated with their compositional and structural properties.
22 citations
21 May 2011
TL;DR: In this article, the optical properties of AlNxOy============thin films as a function of their composition (by varying both x and y coefficients), and the correspondent changes in======their morphology and structure.
Abstract: The aluminium oxynitride system offers the possibility to obtain a wide range of optical responses, by combining
metallic aluminium, aluminium oxide and aluminium nitride properties, and thus opening a significant number of
possible applications. The main purpose of the present work is to study the variation of the optical properties of AlNxOy
thin films as a function of their composition (by varying both x and y coefficients), and the correspondent changes in
their morphology and structure. The films were deposited by DC reactive magnetron sputtering, with the discharge
parameters monitored during the deposition in order to control the chemical composition. The measurements reveal a
smooth change of films Reflectance/Transmittance as a function of the concentration ratio of non metallic elements
(O+N) to metallic Al, thus revealing the possibility to tailor the films optical properties according to the application
envisaged.
11 citations