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Showing papers by "Joel Nuno Pinto Borges published in 2012"

Journal Article•DOI•
Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering

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Joel Nuno Pinto Borges1, Nicolas Martin2, N.P. Barradas3, Eduardo Alves3, D. Eyidi4, M.F. Beaufort4, J.P. Rivière4, Filipe Vaz1, Luis Marques1 •
University of Minho1, Centre national de la recherche scientifique2, Instituto Superior Técnico3, University of Poitiers4
31 Aug 2012-Thin Solid Films
TL;DR: In this paper, direct current magnetron sputtering was used to produce AlN x O y thin films, using an aluminum target, argon and a mixture of N 2 −+ O 2 (17:3) as reactive gases.

29 citations