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Kenneth A. Goldberg

Researcher at Lawrence Berkeley National Laboratory

Publications -  32
Citations -  512

Kenneth A. Goldberg is an academic researcher from Lawrence Berkeley National Laboratory. The author has contributed to research in topics: Interferometry & Extreme ultraviolet lithography. The author has an hindex of 15, co-authored 32 publications receiving 510 citations. Previous affiliations of Kenneth A. Goldberg include University of California.

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Patent

Hybrid shearing and phase-shifting point diffraction interferometer

TL;DR: In this article, a hybrid shearing and point diffraction interferometer system for testing an optical element that is positioned along an optical path including a source of electromagnetic energy in the optical path, a first beam splitter that is secured to a device, and a detector positioned after the hybrid mask.
Patent

In Situ alignment system for phase-shifting point-diffraction interferometry

TL;DR: In this paper, a method to facilitate the gross alignment of patterned object and image-plane masks in optical systems such as the phase-shifting point diffraction interferometer is provided.
PatentDOI

Dual-domain point diffraction interferometer

TL;DR: In this article, a hybrid spatial/temporal domain point diffraction interferometer (dual-domain PS/PDI) that is capable of suppressing the scattered-reference-light noise that hinders the conventional PS and PDI is provided.
Patent

Phase-shifting point diffraction interferometer phase grating designs

TL;DR: Diffraction phase gratings are employed in phase-shifting point diffraction interferometers to improve the interferometric fringe contrast as discussed by the authors, where the diffraction phase grating diffracts a zeroth order diffraction of light at a first power level to the test-beam window of a mask that is positioned at the image plane and a first-order diffraction at a second power to the reference-beam pinhole.
Patent

Phase-shifting point diffraction interferometer mask designs

TL;DR: In this paper, a phase-shifting point diffraction interferometer was proposed to improve the operation of the interferometers by keeping the test beam window of the mask small compared to the separation distance between the beams.