K
Kiwamu Takehisa
Publications - 1
Citations - 14
Kiwamu Takehisa is an academic researcher. The author has contributed to research in topics: Ultraviolet & Mask inspection. The author has an hindex of 1, co-authored 1 publications receiving 14 citations.
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Deep ultraviolet light source, mask inspection device using same, and exposure device
Kiwamu Takehisa,究 武久 +1 more
TL;DR: In this article, the authors proposed to provide a mask inspection device and an exposure device which have a high defect detection sensitivity due to this deep ultraviolet laser light source and are small-sized and stable.