L
L Jordan
Researcher at Delphi Automotive
Publications - 1
Citations - 103
L Jordan is an academic researcher from Delphi Automotive. The author has contributed to research in topics: Wafer & Wafer bonding. The author has an hindex of 1, co-authored 1 publications receiving 102 citations.
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Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder
Douglas Ray Sparks,G Queen,R Weston,G Woodward,Michael W. Putty,L Jordan,S Zarabadi,K Jayakar +7 more
TL;DR: The fabrication and reliability of a solder wafer-to-wafer bonding process is discussed in this article, where factors affecting hermeticity, shorts, Q values, shifting cavity pressure, wafer saw cleanliness and corrosion resistance are discussed.