Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

Although the study of plants (botany) is one of the oldest sciences, relatively detailed quantitative theories of water transport in plant tissue have lagged behind those describing water transport in soils and other geologic materials which constitute the saturated and unsaturated zones. Many existing texts deal with various aspects of water transport in these earth materials, but little or nothing is devoted to the analogous transport of water in plant roots and tissue at a similar quantitative level. Yet the soil-root-stem water pathway is a major component of the subsurface hydrologic system. Evidently there is a need for both engineering and agricultural hydrologists to further develop their quantitative understanding of water movement in plant and soil-plant systems. Modern quantitative theories of water transport in plants can be traced to concepts developed and disseminated effectively in landmark papers by Gradmann and van den Honert in 1928 and 1948 respectively. The material reviewed in this paper, while more advanced, is based on these concepts. Emphasis is placed on water movement in soil containing roots and on a general approach to water transport in living plant tissue. Detailed quantitative studies of water extraction by plant roots date back to studies by Gardner published in 1960. Many contemporary models are built around extraction functions in the Darcy-Richards equation. Several such functions are listed in a table, and their applications, relative advantages, and limitations are discussed in the text. In a series of papers published in 1958, Philip developed the first detailed quantitative description of water transport in plant tissue. His approach resulted in a diffusion equation which could be written with water potential as the dependent variable. Philip's derivation assumed that water movement was primarily from vacuole to vacuole. Subsequent workers have refined and extended Philip's development to include water movement in cell walls and plasmodesmata. The development, interpretation, and application of these models over the past decade is presented in some detail. It can be argued that contemporary models of water transport in plant tissue are oversimplified. However, they have been subjected to some successful testing and they provide a framework within which to devise experiments. Moreover, the recent development of sophisticated experimental techniques should result in more detailed model testing during the 1980's.

Models of water transport in the soil‐plant system: A review

Control: A perspective

Small but Perfectly Formed? Successes, Challenges, and Opportunities for Microfluidics in the Chemical and Biological Sciences

The energy consumption of DRAM is a critical concern in modern computing systems. Improvements in manufacturing process technology have allowed DRAM vendors to lower the DRAM supply voltage conservatively, which reduces some of the DRAM energy consumption. We would like to reduce the DRAM supply voltage more aggressively, to further reduce energy. Aggressive supply voltage reduction requires a thorough understanding of the effect voltage scaling has on DRAM access latency and DRAM reliability. In this paper, we take a comprehensive approach to understanding and exploiting the latency and reliability characteristics of modern DRAM when the supply voltage is lowered below the nominal voltage level specified by manufacturers.

https://dl.acm.org/doi/pdf/10.1145/3084447

Understanding Reduced-Voltage Operation in Modern DRAM Devices: Experimental Characterization, Analysis, and Mechanisms

Spice (simulation program with integrated circuit emphasis)

Hermann K. Gummel made numerous fundamental and high-impact contributions to the IC industry, in particular to IC design technologies. One of the most notable was in the domain of bipolar transistors: Today nobody designs bipolar transistors, or circuits based on bipolar transistors, without using the eponymous “Gummel plot.” An early pioneer of the IC industry, Hermann passed away in 2022, the year of the 75th anniversary of the invention of the transistor. Here, six of his former coworkers review some of Hermann’s most significant and wide-reaching contributions, to bipolar transistor modeling in particular and to computer-aided IC design technology in general, and reminisce about his warm and exceptional personality.

Laurence Nagel

Papers

Spice (simulation program with integrated circuit emphasis)

Hermann K. Gummel and His Unique Legacy in the Field of CAD Technology for Integrated Electronics: Six Former Coworkers Remember and Reminisce