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Leslie L. Deck

Researcher at Zygo Corporation

Publications -  104
Citations -  3233

Leslie L. Deck is an academic researcher from Zygo Corporation. The author has contributed to research in topics: Interferometry & Astronomical interferometer. The author has an hindex of 30, co-authored 103 publications receiving 3125 citations.

Papers
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Journal ArticleDOI

High-speed noncontact profiler based on scanning white-light interferometry

TL;DR: A system for fast three-dimensional profilometry, of both optically smooth and optically rough surfaces, based on scanning white-light techniques, using an efficient algorithm to extract and save only the region of interference, substantially reducing both the acquisition and the analysis times.
Journal ArticleDOI

Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain

TL;DR: In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.
Journal ArticleDOI

Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms

TL;DR: In this paper, the authors demonstrate a simple way of increasing the data acquisition and processing speed in a scanning white-light interferometer for surface topography measurement, which consists of undersampling interference data and processing the resultant sub-Nyquist interferograms in the frequency domain to create complete three-dimensional images.
Patent

Frequency transform phase shifting interferometry

TL;DR: In this article, the authors proposed a method to analyze wavelength-tune PSI data in the frequency domain to produce spectrally separated frequency peaks each corresponding to a particular pair of surfaces in an interferometric cavity defined by multiple pairs of surfaces.
Journal ArticleDOI

Fourier-transform phase-shifting interferometry

TL;DR: The basic theory behind the technique is reviewed and applied specifically to the measurement of parallel plates, where surfaces, optical and physical thickness, and homogeneity are simultaneously obtained.