In the late nineteenth century, Heinrich Hertz demonstrated that the electromagnetic properties of materials are intimately related to their structure at the subwavelength scale by using wire grids with centimetre spacing to manipulate metre-long radio waves. More recently, the availability of nanometre-scale fabrication techniques has inspired scientists to investigate subwavelength-structured metamaterials with engineered optical properties at much shorter wavelengths, in the infrared and visible regions of the spectrum. Here we review how optical metamaterials are expected to enhance the performance of the next generation of integrated photonic devices, and explore some of the challenges encountered in the transition from concept demonstration to viable technology.

Subwavelength integrated photonics.

DOI: 10.1002/adom.201801433 Scientific American selects plasmonic sensing as the top 10 emerging technologies of 2018.[15] Almost every single new plasmonic or photonic structure would be explored to test its sensing ability.[16–29] These works tend to report the sensing performance of their own structure. Some declare that their sensitivity breaks the world record. However, there is still a missing literature on what the world record really is, the gap between the experiments and the theoretical limit, as well as the differences between metal-based plasmonic sensors and dielectric-based photonic sensors. To push plasmonic and photonic sensors into industrial applications, an optical sensing technology map is absolutely necessary. This review aims to cover a wide range of most representative plasmonic and photonic sensors, and place them into a single map. The sensor performances of different structures will be distinctly illustrated. Future researchers could plot the sensing ability of their new sensors into this technology map and gauge their performances in this field. In this review, we focus on optical refractive index (RI) sensors with no fluorescent labeling required. We will utilize two parameters to characterize and compare the performance of optical RI sensors: sensitivity to RI change (denoted by symbol SRI) and figure of merit (in short, FoM). For simplicity, we restrict our discussions to bulk RI change, where the change in RI occurs within the whole sample. There is another case where the RI variation occurs only within a very small volume close to the sensor surface. This surface RI sensitivity is proportional to the bulk RI sensitivity, the ratio of the thickness of the layer within which the surface RI variation occurs, and the penetration depth of the optical mode.[6] The bulk RI sensitivity defines the ratio of the change in sensor output (e.g., resonance angle, intensity, or resonant wavelength) to the bulk RI variations. Here, we limit our discussions to the spectral interrogations and the bulk RI sensitivity SRI is given by[3,5–7,30]

Optical Refractive Index Sensors with Plasmonic and Photonic Structures: Promising and Inconvenient Truth

Thanks to advanced semiconductor microfabrication technology, chip-scale integration and miniaturization of lab-on-a-chip components, silicon-based optical biosensors have made significant progress for the purpose of point-of-care diagnosis In this review, we provide an overview of the state-of-the-art in evanescent field biosensing technologies including interferometer, microcavity, photonic crystal, and Bragg grating waveguide-based sensors Their sensing mechanisms and sensor performances, as well as real biomarkers for label-free detection, are exhibited and compared We also review the development of chip-level integration for lab-on-a-chip photonic sensing platforms, which consist of the optical sensing device, flow delivery system, optical input and readout equipment At last, some advanced system-level complementary metal-oxide semiconductor (CMOS) chip packaging examples are presented, indicating the commercialization potential for the low cost, high yield, portable biosensing platform leveraging CMOS processes

Silicon Photonic Biosensors Using Label-Free Detection.

Methods for quantitative fluorescent analysis reemphasize the dependence of scientific advances on technologic development. The techniques of fluorescent assay are versatile and relatively simple. Their sensitivity is comparable to that of radioactive assay methods, making possible the detection of trace amounts of many substances. This volume is a remarkably complete summary of a rapidly advancing field. A refreshing introduction reviews the relationship of physicists and biologists to the development of techniques for fluorescent assay and is followed by an essentially nonmathematical treatment of luminescence and fluorescence. Sections on instrumentation are detailed. The ultrasensitivity of fluorescence analysis leads to problems of contamination, self-absorption, and quantitative recovery similar to those with radioactive isotopes. These problems are carefully delineated by the author. Specific applications of fluorescent measurement constitute the bulk of the book. Of particular interest are methods for assay of antibiotics such as griseofulvin and the tetracyclines, catecholamines, plus fluorescent microscopy and

Fluorescence Assay in Biology and Medicine

Segmenting silicon waveguides at the subwavelength scale produce an equivalent homogenous material. The geometry of the waveguide segments provides precise control over modal confinement, effective index, dispersion and birefringence, thereby opening up new approaches to design devices with unprecedented performance. Indeed, with ever-improving lithographic technologies offering sub-100-nm patterning resolution in the silicon photonics platform, many practical devices based on subwavelength structures have been demonstrated in recent years. Subwavelength engineering has thus become an integral design tool in silicon photonics, and both fundamental understanding and novel applications are advancing rapidly. Here, we provide a comprehensive review of the state of the art in this field. We first cover the basics of subwavelength structures, and discuss substrate leakage, fabrication jitter, reduced backscatter, and engineering of material anisotropy. We then review recent applications including broadband waveguide couplers, high-sensitivity evanescent field sensors, low-loss devices for mid-infrared photonics, polarization management structures, spectral filters, and highly efficient fiber-to-chip couplers. We finally discuss the future prospects for subwavelength silicon structures and their impact on advanced device design.

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Subwavelength-Grating Metamaterial Structures for Silicon Photonic Devices

In this paper, unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating (SWG) waveguides are studied and demonstrated. The SWG structure consists of periodic silicon pillars in the propagation direction with a subwavelength period. Effective sensing region in the SWG microring resonator includes not only the top and side of the waveguide, but also the space between the silicon pillars on the light propagation path. It leads to greatly increased sensitivity and a unique surface sensing property in contrast to common evanescent wave sensors: the surface sensitivity remains constantly high as the surface layer thickness grows. Microring resonator biosensors based on both SWG waveguides and conventional strip waveguides were compared side by side in surface sensing experiment and the enhanced surface sensing capability in SWG based microring resonator biosensors was demonstrated.

Unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating waveguides.

Compared to the conventional strip waveguide microring resonators, subwavelength grating (SWG) waveguide microring resonators have better sensitivity and lower detection limit due to the enhanced photon-analyte interaction. As sensors, especially biosensors, are usually used in absorptive ambient environment, it is very challenging to further improve the detection limit of the SWG ring resonator by simply increasing the sensitivity. The high sensitivity resulted from larger mode-analyte overlap also brings significant absorption loss, which deteriorates the quality factor of the resonator. To explore the potential of the SWG ring resonator, we theoretically and experimentally optimize an ultrasensitive transverse magnetic mode SWG racetrack resonator to obtain maximum quality factor and thus lowest detection limit. A quality factor of 9800 around 1550 nm and sensitivity of 429.7 ± 0.4nm/RIU in water environment are achieved. It corresponds to a detection limit (λ/S·Q) of 3.71 × 10-4 RIU, which marks a reduction of 32.5% compared to the best value reported for SWG microring sensors.

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators

We propose a coupled-tolerant subwavelength photonic racetrack resonator (PRR) on the silicon-on-insulator (SOI) platform, in which a subwavelength grating (SWG) PRR is coupled to a symmetrical SWG bus waveguide. The material equivalent refractive index can be manipulated by the SWG characteristic and thus an additional fabrication degree of freedom can be achieved. The resonant characteristics can be improved significantly by controlling the pillar size and increasing the interaction length between SWG racetrack and bus waveguide (RBW). The simulation results show that the PRR has a high-quality factor and large extinction ratio around 1550nm. Two groups of SWG and strip waveguide (SW) PRRs are fabricated. The fabrication tolerance is tested when fabrication error is changed from 0 to 20 nm and the quality factor is more than 7000 in de-ionized water. The testing results show that the tolerance in SWG-PRR has a 2.0-fold improvement than that in the SW-PRR. Then a fabricated SWG-PRR is employed to monitor different concentration glycerol injected on the chip. An optimal quality factor of 9500 around 1550 nm and bulk sensitivity of 412± 0.5 nm/RIU are achieved. Therefore, the structure is a potential candidate for label-free sensing in medical diagnosis and environmental monitoring.

Subwavelength Racetrack Resonators With Enhanced Critically Coupled Tolerance for On-Chip Sensing

A one-dimensional photonic crystal elliptical-hole tapered low-index-mode nanobeam cavity sensor fully encapsulated in a water environment is proposed. In the proposed structure, to confine the light in the low-index region and enhance the light–matter interaction, a tapered major axis of the elliptical hole away from the nanobeam cavities center is optimized. Through a three-dimensional finite-difference time-domain simulation, the results show that the low-index-mode of the middle geometry cell is confined in the photonic bandgap of two-sided cells. The highest quality factor of 6.04×105 is achieved when 13 tapered segments and 5 mirror segments are placed at both sides of the host waveguide. The proposed nanobeam structure theoretically possesses a sensitivity of 244.7 nm/RIU (refractive index unit) in a water environment. Moreover, an ultra-compact footprint of 6.4  μm×0.85  μm is achieved, which is only half of the size compared to the best value reported for the nanobeam structure. The results indicate that it is a promising sensor for excellent on-chip sensing with respect to the very small footprint.

Photonic crystal elliptical-hole tapered low-index-mode nanobeam cavities for sensing.

Microring resonators on silicon-on-insulator substrate have been demonstrated to be promising in sensing applications. We study a microring resonator biosensor based on a novel subwavelength grating (SWG) waveguide structure, which consists of periodic silicon pillars in the propagation direction with a subwavelength period. In this structure, effective sensing region includes not only the top and side of the waveguide, but also the space in between the silicon pillars which is on the path of the propagation mode. This leads to greatly increased bulk refractive index sensitivity as well as extended surface sensing region with constantly high surface sensitivity.

Lijun Huang

Papers

Unique surface sensing property and enhanced sensitivity in microring resonator biosensors based on subwavelength grating waveguides.

Improving the detection limit for on-chip photonic sensors based on subwavelength grating racetrack resonators

Subwavelength Racetrack Resonators With Enhanced Critically Coupled Tolerance for On-Chip Sensing

Photonic crystal elliptical-hole tapered low-index-mode nanobeam cavities for sensing.

Enhanced surface sensitivity in microring resonator biosensor based on subwavelength grating waveguides