Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.

http://science.sciencemag.org/content/sci/288/5463/113.full.pdf

Monolithic microfabricated valves and pumps by multilayer soft lithography

High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

https://science.sciencemag.org/content/sci/298/5593/580.full.pdf

Microfluidic large scale integration

In areas from assembly of machines to surgery, and from deactivation of improvised explosive devices (IEDs) to unmanned flight, robotics is an important and rapidly growing field of science and technology. It is currently dominated by robots having hard body plans—constructions largely of metal structural elements and conventional joints—and actuated by electrical motors, or pneumatic or hydraulic systems. Handling fragile objects—from the ordinary (fruit) to the important (internal organs)—is a frequent task whose importance is often overlooked and is difficult for conventional hard robots; moving across unknown, irregular, and shifting terrain is also. Soft robots may provide solutions to both of these classes of problems, and to others. Methods of designing and fabricating soft robots are, however, much less developed than those for hard robots. We wish to expand the methods and materials of chemistry and soft-materials science into applications in fully soft robots. A robot is an automatically controlled, programmable machine. The limbs of animals or insects—structures typically based on rigid segments connected by joints with constrained ranges of motion—often serve as models for mobile elements of robots. Although mobile hard robots sometimes have limb-like structures similar to those of animals (an example is “Big Dog” by Boston Robotics), more often, robots use structures not found in organisms—for example, wheels and treads. The robotics community defines “soft robots” as: 1) machines made of soft—often elastomeric—materials, or 2) machines composed of multiple hard-robotic actuators that operate in concert, and demonstrate soft-robot-like properties; here, we consider only the former. Soft animals offer new models for manipulation and mobility not found, or generated only with difficulty and expense, using hard robots. Because materials from which this class of devices will be fabricated will usually be polymers (especially elastomers), they fall into the realm of organic materials science. The use of soft materials allows for continuous deformation. This type of deformation, in turn, enables structures with ranges of motion limited only by the properties of the materials. Soft robots have the potential to exploit types of structures found, for example, in marine organisms, and in non-skeletal parts of land animals. The tentacles of squid, trunks of elephants, and tongues of lizards and mammals are such examples; their structures are muscular hydrostats. Squid and starfish 14] are highly adept locomotors; their modes of movement have not been productively used, and permit solutions of problems in manipulation, locomotion, and navigation, that are different from those used in conventional hard robotics. The prototypical soft actuator—muscle—developed through the course of evolution. There is currently no technology that can replicate the balanced performance of muscle: it is simultaneously strong and fast, and enables a remarkable range of movements (such as those of a tongue). Muscle-like contraction and dilation occur in ionic polymeric gels on changes in the acidity or salinity of a surrounding ionic solution, but actuation in macroscopic structures is masstransport limited, and typically slow. Other electroactive polymers (EAPs) include dielectric elastomers, electrolytically active polymers, polyelectrolyte gels, and gel-metal composites. Pneumatically-driven McKibben-type actuators are among the most highly developed soft actuators, and have existed for more than fifty years; they consist of a bladder covered in a shell of braided, strong, inextensible fibers. These actuators can be fast, and have a length-load dependence similar to that of muscle but possess only one actuation mode—contraction and extension when pressurization changes. They are, in a sense, an analogue to a single muscle fibril ; using them for complex movements requires multiple actuators acting in series or parallel. Pneumaticallydriven flexible microactuators (FMAs) have been shown to be capable of bending, gripping, and manipulating objects. Roboticists have explored scalable methods for gripping and manipulating objects at the micro and nano scales. The use of compliant materials allows grippers to manipulate objects such as fruit with varied geometry. The field of robotics has not yet caught the attention of soft-materials scientists and chemists. Developing new materials, techniques for fabrication, and principles of design will create new types of soft robots. The objective of this work is to demonstrate a type of design that provides a range of behaviors, and that offers chemists a test bed for new materials and methods of fabrication for soft robots. Our designs use embedded pneumatic networks (PneuNets) of channels in elastomers [*] Prof. G. M. Whitesides Wyss Institute for Biologically Inspired Engineering Harvard University, 3 Blackfan Circle, Boston, MA 02115 (USA) Fax: (+ 1)617-495-9857 and Kavli Institute for Bionano Science & Technology 29 Oxford Street, Cambridge MA (USA) E-mail: gwhitesides@gmwgroup.harvard.edu Homepage: http://gmwgroup.harvard.edu/

/pdf/soft-robotics-for-chemists-2q91i30o62.pdf

Soft robotics for chemists

Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

The MEMS Handbook

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

Microfabricated elastomeric valve and pump systems

The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to allow reconfigurable RF functions such as filters, oscillators or antennas. This paper will focus on the MEMS electromechanical resonators which show interesting performances to replace SAW filters or quartz reference oscillators, allowing smaller integrated functions with lower power consumption. The resonant frequency depends on the material properties, such as Young's modulus and density, and on the movable mechanical structure dimensions (beam length defined by photolithography). Thus, it is possible to obtain multi frequencies resonators on a wafer. The resonator performance (frequency, quality factor) strongly depends on the environment, like moisture or pressure, which imply the need for a vacuum package. This paper will present first resonator mechanisms and mechanical behaviors followed by state of the art descriptions with applications and specifications overview. Then MEMS resonator developments at STMicroelectronics including FEM analysis, technological developments and characterization are detailed.

Silicon on Nothing Mems Electromechanical Resonator

Most of commercial Atomic Force Microscope (AFM) oscillating probes use micrometric cantilevers that can make measurement with piconewton force resolution under vacuum. However, the flexure vibration cantilevers suffer from a degradation of both resonance frequency and quality factor when operating in liquids. Moreover, the additional laser set-up for amplitude detection also limits the integration and miniaturization of the resonator structure. In order to overcome these difficulties, we propose to replace cantilevers by bulk mode, in-plane vibrating MEMS resonators with integrated transduction methods.

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

An electromagnetic field can be exploited for remote powering and control of microsystems. An interesting case is the application to microrobotics, which is an important field of research. Many applications are expected, particularly in the field of the microassembly and the test of circuits in confined environments [1]. This chapter describes the underlying principles and reports the successful asynchronous remote operation of two Distributed Micro Mechanical Systems (DMMS) by inductive coupling. The intelligence of the system is provided by a custom high-voltage controller IC providing the link between the power and data on the receiver antenna on one side, and the actuators and eventually sensors of the microrobot on the other side. Details on the antenna design in order to optimize the inductive coupling are given. The demonstrator achieved the independent remote control of two arrays of 1,700 electrostatic actuators, having a total capacitance of 2 nF.

Lionel Buchaillot

Papers

Silicon on Nothing Mems Electromechanical Resonator

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Remote Powering and Control of Intelligent Microsystems

MEMS electromechanical resonators for RF applications

Characterization of individual bio-cells with thermally actuated probe arrays