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M

M. Kubo

Researcher at Hitachi

Publications -  1
Citations -  88

M. Kubo is an academic researcher from Hitachi. The author has contributed to research in topics: Breakdown voltage & Field-effect transistor. The author has an hindex of 1, co-authored 1 publications receiving 84 citations.

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Characteristics and limitation of scaled-down MOSFET's due to two-dimensional field effect

TL;DR: In this article, the authors investigated the practical limitations of minimum-size MOS-LSI devices through measurement of experimental devices and concluded that the smallest feasible device has a channel length of 0.52 µm and a gate oxide thickness of 9.4 nm when the supply voltage is 1.5 V.