Lithium niobate (LiNbO 3 , LN) channel and ridge waveguides have been successfully fabricated by He ion implantation, which has energy of 500 keV and fluence of 1.5 × 10 16 ions = cm 2 and is combined with lithography and the precise diamond dicing technique. The refractive index profile of the annealed LN planar waveguide was reconstructed. The propagation loss of the channel waveguide with a width of 10 μ m and that of the ridge waveguides with widths of 25 μ m and 15 μ m were investigated by the end-face coupling method. In our work, the factors that affect the waveguide properties of channel and ridge waveguides were revealed.

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LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Lattice structures and optical properties of Ce:LYSO crystal waveguides with implanted C, Si and Cu ions

Natural MoS2 single crystals are irradiated with Ni ions with different fluences at 1 MeV and 357 MeV. The Stopping and Range of Ions in Matter software packages are used to simulate the process of Ni-ion beam peneration through the natural MoS2 single crystal. The electronic and nuclear stopping powers, displacement per atom and atoms vacancy profiles are simulated. The results show that S atoms are susceptible to the Ni-ion irradiation of natural MoS2 single crystals. Redshifts of the out-of-plane vibrations of S atoms and in-plane Mo–S phonon mode and the magnetic hysteresis loops are both recorded in the bulk and Ni-ion-irradiated natural MoS2 single crystals. 

Properties of the natural MoS2 crystal irradiated by medium- and high-energy Ni ions

In this work, we report on the preparation and characterization of the planar and ridge optical waveguides in the Er3+-doped germanate glass by combining hydrogen ion implantation and precise diamond blade dicing. The nuclear energy loss and the implantation depth were calculated by the SRIM 2013 software. The refractive index profile was obtained by the reflectivity calculation method. The dark-mode spectrum and the near-field intensity distribution were measured by the prism coupling system and end-face coupling technique, respectively. This work has important reference significance for the development of Er3+-doped germanate glass active devices in the optical communication field.

Optical planar and ridge waveguides formed in Er3+-doped germanate glass by ion implantation and precise diamond blade dicing.

We report on the fabrication and optimization of lithium niobate planar and ridge waveguides at the wavelength of 633 nm. To obtain a planar waveguide, oxygen ions with an energy of 3.0 MeV and a fluence of 1.5×1015 
ions/cm2 are implanted in the polished face of LiNbO3 crystals. For planar waveguides, a loss of 0.5 dB/cm is obtained after annealing at 300°C for 30 min. The ridge waveguide is fabricated by the diamond blade dicing method on optimized planar waveguides. The guiding properties are investigated by prism coupling and end-face coupling methods.

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Ming-Yang Bu

Papers

Lithium niobate planar and ridge waveguides fabricated by 3 MeV oxygen ion implantation and precise diamond dicing

LiNbO3 channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Lattice structures and optical properties of Ce:LYSO crystal waveguides with implanted C, Si and Cu ions

Optical properties investigation on Er3+ ion-doped tellurite glass by hydrogen and oxygen ion implantation