Nicolas Cornille

TL;DR: In this paper, a combination of drift distortion removal and spatial distortion removal is performed to correct Scanning Electron Microscope (SEM) images at both ×200 and ×10,000 magnification.

TL;DR: In this paper, a method for correcting both spatial and drift distortions that are present in scanning electron microscope (SEM) images is described, which employs a series of in-plane rigid body motions and a generated warping function.

TL;DR: In this article, an integrated methodology for accurate 3D metric reconstruction and deformation measurements using single column scanning electron microscope imaging systems is described, where the specimen stage is rotated in order to obtain stereo views of the specimen as it undergoes mechanical or thermal loading.

TL;DR: Methods for both the accurate calibration and the use of an Environmental Scanning Electron Microscope (ESEM) for accurate 3D reconstruction are described and the presence of high-frequencies components in the distortion field demonstrates that classic parametric distortion models are not sufficient to model distortions in a typical ESEM system.

TL;DR: The method achieves promising performance in tests with synthetic data including missing elements, displaced elements, size changes, and combinations of these cases and opens good prospects for using the method with realistic data.