Rapid progress in several high-tech industries has significantly increased the need for dimensional micro- and nano-metrology. Structures to be measured are becoming more complex with smaller structure widths and higher aspect ratios in increasingly larger surface regions and potentially highly curved surfaces. Significant international effort can be seen to develop high-capacity measuring machines with nanometre precision in growing measuring ranges up to hundreds of millimetres. This paper begins with an outline of the requirements stemming from high-tech developments currently being done or expected in the future and discusses recent developments in the field of nanopositioning and nanomeasuring technology with respect to basic measurement approaches, laser interferometer systems. The large range of nanoprobe systems usable in nanomeasuring machines is discussed, such as optical focus sensors, white light interferometer microscopes, CCD camera microscopes using the depth from the focus method, tactile stylus probes, atomic force microscopes (AFMs) and 3D microprobes. The versatile properties of these sensors allow the machine to be used in many different metrological applications. The paper also introduces a multi-sensor approach using a microscope revolver. It concludes with an illustration of metrologically challenging measurements, e.g., scanning micro-structures of curved optical surfaces or performing AFM scans of very large regions with significant data volume.

https://iopscience.iop.org/article/10.1088/0957-0233/23/7/074001/pdf

Recent developments and challenges of nanopositioning and nanomeasuring technology

This paper presents a novel design of six-degree-of-freedom (6-DOF) magnetically levitated (maglev) positioner, where its translator and stator are implemented by four groups of 1-D Halbach permanent-magnet (PM) arrays and a set of square coils, respectively. By controlling the eight-phase square coil array underneath the Halbach PM arrays, the translator can achieve 6-DOF motion. The merits of the proposed design are mainly threefold. First, this design is potential to deliver unlimited-stroke planar motion with high power efficiency if additional coil switching system is equipped. Second, multiple translators are allowed to operate simultaneously above the same square coil stator. Third, the proposed maglev system is less complex in regard to the commutation law and the phase number of coils. Furthermore, in this paper, an analytical modeling approach is established to accurately predict the Lorentz force generated by the square coil with the 1-D Halbach PM array by considering the corner region, and the proposed modeling approach can be extended easily to apply on other coil designs such as the circular coil, etc. The proposed force model is evaluated experimentally, and the results show that the approach is accurate in both single- and multiple-coil cases. Finally, a prototype of the proposed maglev positioner is fabricated to demonstrate its 6-DOF motion ability. Experimental results show that the root-mean-square error of the implemented maglev prototype is around 50 nm in planar motion, and its velocity can achieve up to 100 mm/s.

Design and Modeling of a Six-Degree-of-Freedom Magnetically Levitated Positioner Using Square Coils and 1-D Halbach Arrays

A motion mechanism of an XY micro-stage is designed and constructed for precision positioning of light weight objects. A driving unit, which consists of two PZTs and a friction component made by permanent magnet, is mounted on the center of the stage base for driving the stage moving plate made by steel in the X - and Y -directions based on a friction drive. The moving plate is attached on the friction component by the magnetic force. Leaf springs are employed to guide the X - and Y -directional motions of the moving plate over a range of ±1 mm in both directions. The stage motion mechanism, which dominates the overall size of XY micro-stage, has a compact size of 24 mm ( X ) × 24 mm ( Y ) × 5 mm ( Z ). The basic performances of the stage motion mechanism have been investigated by experiments.

Design and construction of the motion mechanism of an XY micro-stage for precision positioning

In this article we describe the design of a universal ultra-precision positioning platform to be used in the development of many different nano-manufacturing processes. The system incorporates the concept of employing different interchangeable manufacturing and characterization tools with one ultra-precision positioning system. A multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10 mm × 10 mm travel range with an XY linear position resolution of less than 1 nm and an angular resolution about the Z axis of 0.05 μrad over a range of about a degree (determined by plane mirror interferometer optics). A piezoelectric transducer (PZT) driven tripod positioning system is used to align each manufacturing and characterization tool with the substrate through a travel range of 40 μm along the Z axis and 245 μrad of rotation about the X and Y axes. The mechanical design, an overview of the system error analysis, preliminary component performance results, and the results of the first micro-imprint fabricated with the machine are presented.

Multi-scale Alignment and Positioning System – MAPS

Large range nanopositioning stage design: A three-layer and two-stage platform

High productivity and high quality can be achieved in broaching if the process is applied properly. Roughing, semifinishing and finishing can be performed in one stroke of the tool increasing productivity and reducing set-up time. Furthermore, high quality surface finish can be obtained due to straight motion of the tool. One big disadvantage of broaching is that all process parameters, except cutting speed, are built into broaching tools. Therefore, it is not possible to modify cutting conditions during the process once the tool is manufactured. Improved design of broaching tools needs detailed modeling and analysis of the broaching process. In this paper, tool optimization method and process models are presented. Cutting forces, tooth stresses, part deflections are modeled and analyzed using cutting models and FEA. The results of the analysis are summarized in analytical forms so that they can be used for other applications although turbine disc broaching is considered as the application which is one of the most complex broaching operations. Application of the model for improved and optimized tool design are demonstrated by examples.Copyright © 2003 by ASME

https://www.sabanciuniv.edu/mdbf/mrl/PUBLICATIONS/IMECE2003-42304_42.pdf

Modeling of Broaching Process for Improved Tool Design

Broaching is one of the most recognised machining processes that can yield high productivity and high quality when applied properly. One big disadvantage of broaching is that all process parameters, except cutting speed, are built into the broaching tools. Therefore, it is not possible to modify the cutting conditions during the process once the tool is manufactured. Optimal design of broaching tools has a significant impact to increase the productivity and to obtain high quality products. In this paper, an optimisation model for broaching design is presented. The model results in a non-linear non-convex optimisation problem. Analysis of the model structure indicates that the model can be decomposed into smaller problems. The model is applied to a turbine disc broaching problem which is considered as one of the most complex broaching operations.

Identifying parameters of a broaching design using non-linear optimisation

High precision motion is critical in the semiconductor industry and as feature size continues to decrease, the need for higher precision increases. This paper presents the control system design and integration of a novel multi-degree of freedom precision stage for nano-manufacturing. It is composed of a 6 DOF wafer holder and a 3 DOF module holder. The modules can be chosen for a desired task, such as a nano-imprint lithography module. Capacitance gauges, interferometers, and photo detectors provide position feedback of the stage. Piezo-electric actuators and linear motors, that produce two orthogonal forces each, produce the desired output. Modeling of the coordinate transformation among the spaces of sensors, stage position, and actuators along with dynamic modeling of the stage is presented. Controller design, hardware, and software is described and results comparing simulation and implementation show a closed-loop positioning of less than 1 nm error in x and y and 0.01 arc seconds in θ z with a sensor noise level of less than 0.2 nm.Copyright © 2009 by ASME

Mechatronics and Control of a Precision Motion Stage for Nano-Manufacturing

Broaching is one of the most recognized machining processes that can yield high productivity and high quality whe n applied properly. One big disadvantage of broaching is that a ll process parameters, except cutting speed, are built into the broaching tools. Therefore, it is not possibl e to modify the cutting conditions during the process on ce the tool is manufactured. Optimal design of broaching tools has a significant impact to increase the productivity and t o obtain high quality products. In this paper, an optimization mode l for broaching design is presented. The model results in a non-linear non-convex optimization problem. Analysis of the model structure indicates that the model can be decomposed into smaller problems. The model is applied on a turbine disc broaching problem which is considered as one of the most complex broaching operation s.

Ozkan Ozturk

Papers

Multi-scale Alignment and Positioning System – MAPS

Modeling of Broaching Process for Improved Tool Design

Identifying parameters of a broaching design using non-linear optimisation

Mechatronics and Control of a Precision Motion Stage for Nano-Manufacturing

Optimization of Broaching Design