Multi-scale Alignment and Positioning System – MAPS

TLDR: In this paper, a multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10mm-×-10mm travel range with an XY linear position resolution of less than 1nm and an angular resolution about the Z axis of 0.05μrad over a range of about a degree.

Abstract: In this article we describe the design of a universal ultra-precision positioning platform to be used in the development of many different nano-manufacturing processes. The system incorporates the concept of employing different interchangeable manufacturing and characterization tools with one ultra-precision positioning system. A multi-linear-motor-driven XY planar stage floating on a thin film of air is used to traverse a substrate through a 10 mm × 10 mm travel range with an XY linear position resolution of less than 1 nm and an angular resolution about the Z axis of 0.05 μrad over a range of about a degree (determined by plane mirror interferometer optics). A piezoelectric transducer (PZT) driven tripod positioning system is used to align each manufacturing and characterization tool with the substrate through a travel range of 40 μm along the Z axis and 245 μrad of rotation about the X and Y axes. The mechanical design, an overview of the system error analysis, preliminary component performance results, and the results of the first micro-imprint fabricated with the machine are presented.