P
P. Leonov
Publications - 2
Citations - 55
P. Leonov is an academic researcher. The author has contributed to research in topics: Fabrication & Silicon-germanium. The author has an hindex of 2, co-authored 2 publications receiving 55 citations.
Papers
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Journal ArticleDOI
Fabrication of Bond and Etch‐Back Silicon on Insulator Using a Strained Si0.7Ge0.3 Layer as an Etch Stop
Proceedings ArticleDOI
CMOS on bonded wafers fabricated using a novel Si-Ge etch stop
TL;DR: In this paper, the authors used a novel silicon-germanium etch-stop fabrication method to produce a device-film which is thin, defect-free, and highly resistive.