P
P. Roy
Researcher at University of Calcutta
Publications - 1
Citations - 10
P. Roy is an academic researcher from University of Calcutta. The author has contributed to research in topics: Epitaxy & Atmospheric pressure. The author has an hindex of 1, co-authored 1 publications receiving 10 citations.
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Modelling of silicon epitaxy using silicon tetrachloride as the source
TL;DR: In this article, a growth-rate model based on chemical kinetics for vapour phase epitaxy (VPE) of silicon by decomposition of SiCl 4 in a horizontal rectangular reactor at atmospheric pressure was developed.