[신간의 별자리x] 우리/미술, 그리고 ‘슬픔의 박물관’

Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

THE OPTO-MECHANICAL DESIGN PROCESS Introduction Conceptualization Performance Specifications and Design Constraints Preliminary Design Design Analysis and Computer Modeling Error Budgets and Tolerances Experimental Modeling Finalizing the Design Design Reviews Manufacturing the Instrument Evaluating the End Product Documenting the Design References ENVIRONMENTAL INFLUENCES Introduction Parameters of Concern Environmental Testing of Optics References OPTO-MECHANICAL CHARACTERISTICS OF MATERIALS Introduction Materials for Refracting Optics Materials for Reflecting Optics Materials for Mechanical Components Adhesives Sealants Special Coatings for Opto-Mechanical Materials Techniques for Manufacturing Opto-Mechanical Parts References MOUNTING INDIVIDUAL LENSES Introduction Considerations of Centered Optics Cost Impacts of Fabrication Tolerances Lens Weight and Center of Gravity Location Mounting Individual Low-Precision Lenses Mountings for Lenses with Curved Rims Mountings Interfacing with Spherical Surfaces Elastomeric Mountings for Lenses Mounting Lenses on Flexures Alignment of the Individual Lens Mounting Plastic Lenses References MOUNTING MULTIPLE LENSES Introduction Multielement Spacing Considerations Examples of Lens Assemblies with No Moving Parts Examples of Lens Assemblies Containing Moving Parts Lathe Assembly Techniques Microscope Objectives Assemblies Using Plastic Parts Liquid Coupling of Lenses Catadioptric Assemblies Alignment of Multi-Lens Assemblies Alignment of Reflecting Telescope Systems References MOUNTING WINDOWS AND FILTERS Introduction Conventional Window Mounts Special Window Mounts Mounts for Shells and Domes Conformal Windows Filter Mounts Windows Subject to a Pressure Differential References DESIGNING AND MOUNTING PRISMS Introduction Geometric Relationships Designs for Typical Prisms Kinematic and Semikinematic Prism Mounting Principles Mounting Prisms by Clamping Mounting Prisms by Bonding Flexure Mounts for Prisms References DESIGN AND MOUNTING SMALL, NONMETALLIC MIRRORS, GRATINGS, AND PELLICLES Introduction General Considerations Semikinematic Mountings for Small Mirrors Mounting Mirrors by Bonding Flexure Mounts for Mirrors Multiple-Mirror Mounts Mountings for Gratings Pellicle Design and Mounting References LIGHTWEIGHT NONMETALLIC MIRROR DESIGN Introduction Material Considerations Core Cell Configurations Cast Ribbed Substrates Slotted-Strut and Fused Monolithic Substrates Frit-Bonded Substrates Low-Temperature Bonded Substrates Machined-Core Substrates Contoured-Back Solid Mirror Configurations Thin Face Sheet Mirror Configurations Scaling Relationships for Lightweight Mirrors References MOUNTING LARGE, HORIZONTAL-AXIS MIRRORS Introduction General Considerations of Gravity Effects V-Type Mounts Multipoint Edge Supports The Ideal Radial Mount Mercury Tube Mounts Strap and Roller-Chain Mounts Push-Pull Mounts Comparison of Dynamic Relaxation and Finite-Element Analysis Techniques References MOUNTING LARGE VERTICAL-AXIS MIRRORS Introduction Ring Mounts Air Bag (Bladder) Mounts Multiple-Point Supports Metrology Mounts References MOUNTING LARGE, VARIABLE-ORIENTATION MIRRORS Introduction Mechanical Flotation Mounts Hydraulic/Pneumatic Mounts Center-Mounted Mirrors Mounts for Double-Arch Mirrors Bipod Mirror Mounts Thin Face Sheet Mirror Mounts Mounts for Large Space-Borne Mirrors References DESIGN AND MOUNTING OF METALLIC MIRRORS Introduction General Considerations of Metal Mirrors Aluminum Mirrors Beryllium Mirrors Mirrors Made from Other Metals Mirrors with Foam and Metal Matrix Cores Plating of Metal Mirrors Single-Point Diamond Turning of Metal Mirrors Conventional Mountings for Metal Mirrors Integral Mountings for Metal Mirrors Flexure Mountings for Larger Metal Mirrors Interfacing Multiple SPDT Components to Facilitate Assembly and Alignment References OPTICAL INSTRUMENT STRUCTURAL DESIGN Introduction Rigid Housing Configurations Modular Design Principles and Examples A Structural Design for High Shock Loading Athermalized Structural Designs Geometries for Telescope Tube Structures References ANALYSIS OF THE OPTO-MECHANICAL DESIGN Introduction Failure Predictions for Optics Stress Generation at Opto-Mechanical Interfaces Parametric Comparisons of Annular Interface Types Bending Effects Due to Offset Annular Contacts Effects of Temperature Changes Effects of Temperature Gradients Stresses in Cemented and Bonded Optics Due to Temperature Changes Some Effects of Temperature Changes on Elastomerically Mounted Lenses References APPENDIX A: UNITS AND THEIR CONVERSION APPENDIX B: SUMMARY OF METHODS FOR TESTING OPTICAL COMPONENTS AND OPTICAL INSTRUMENTS UNDER ADVERSE ENVIRONMENTAL CONDITIONS APPENDIX C: HARDNESS OF MATERIALS APPENDIX D: GLOSSARY INDEX

Opto-mechanical systems design

A review of recent studies on non-resonant piezoelectric actuators

A review on control strategies for compensation of hysteresis and creep on piezoelectric actuators based micro systems

A simple fuzzy system for modelling of both rate-independent and rate-dependent hysteresis in piezoelectric actuators

In this paper, a novel Takagi–Sugeno (T–S) fuzzy-system-based model is proposed for hysteresis in piezoelectric actuators. The antecedent and consequent structures of the developed fuzzy hysteresis model (FHM) can be identified online through uniform partition approach and recursive least squares (RLS) algorithm, respectively. With respect to the controller design, the inverse of FHM is used to develop a fuzzy internal model (FIM) controller. Decreasing the hysteresis effect, the FIM controller has a good performance of high-speed trajectory tracking. To achieve nanometer-scale tracking precision, the novel fuzzy adaptive internal model (FAIM) controller is uniquely developed. Based on real-time input and output data to update FHM, the FAIM controller is capable of compensating for the hysteresis effect of the piezoelectric actuator in real time. Finally, the experimental results for two cases are shown: the first is with 50 Hz and the other with multiple-frequency (50 + 25 Hz) sinusoidal trajectories tracking that demonstrate the efficiency of the proposed controllers. Especially, being 0.32% of the maximum desired displacement, the maximum error of 50-Hz sinusoidal tracking is greatly reduced to 6 nm. This result clearly indicates the nanometer-scale tracking performance of the novel FAIM controller.

/pdf/adaptive-fuzzy-hysteresis-internal-model-tracking-control-of-56phife33b.pdf

Adaptive Fuzzy Hysteresis Internal Model Tracking Control of Piezoelectric Actuators With Nanoscale Application

A six degree-of-freedom (6-DOF) parallel positioning system with high resolution, high repeatability, and low parasitic motions was proposed. It mainly consists of three identical limbs. Each limb consists of two symmetrical six prismatic-universal-spherical branches. First, the design process for a novel 6-DOF limb with input displacement reduction was introduced. By applying bipods and linear displacement output mechanisms, these novel limbs with symmetric configurations were designed. Moreover, a numerical compliance/stiffness model of the proposed mechanism was built based on the matrix method. This numerical model was verified by ANSYS finite-element analysis (FEA) software package. Hence, the input stiffness, the output compliance, and the stroke of the mechanism can be theoretically estimated. Furthermore, a prototype made of stainless steel 431 was successfully manufactured by wire electrical discharge machining process. It is actuated and sensed by piezoactuators and capacitive displacement sensors, respectively. Finally, the working performances of this proposed mechanism were experimentally investigated. It shows that the spatial resolution can be achieved in 10 nm × 10 nm × 5 nm × 100 nrad × 100 nrad × 200 nrad in an open-loop control. The closed-loop positioning accuracy in 3σ ( σ , standard error) can reach 30 nm × 30 nm × 15 nm × 150 nrad × 150 nrad × 300 nrad. The experimental results not only validate the effectiveness of the proposed positioning system but also verify the nanometer-scale spatial positioning accuracy within several tens of micrometers stroke range. The proposed micro/nanopositioning system may expand the actual application of alignment optical elements in projection lenses of 193 nm immersion lithography.

/pdf/design-and-assessment-of-a-6-dof-micro-nanopositioning-2vzdtbds1n.pdf

Design and Assessment of a 6-DOF Micro/Nanopositioning System

The invention relates to a two-degree of freedom translation parallel decoupling micromotion platform in the technical field of micro electro mechanical systems. The micromotion platform comprises a piezoelectric ceramic driver, two driving branch chains and corresponding auxiliary branch chains thereof, a working platform and a fixed stand, wherein the two driving branch chains and the corresponding auxiliary branch chains thereof are respectively symmetrically distributed in the X direction and the Y direction of the working platform pairwise. The invention achieves the functions of eliminating coupling and parasitic displacement and realizes the two-dimension movement of the motion platform by the decoupling function and the rigidity characteristic of a compound double-parallel straight panel hinge and the symmetrical characteristic of the whole structure of the platform.

Two-degree of freedom translation parallel decoupling micromotion platform

https://www.research.manchester.ac.uk/portal/files/151621889/Dynamic_linear_modeling_identification_and_precise_control_of_a_walking_piezo_actuated_stage.pdf

Pengzhi Li

Papers

A simple fuzzy system for modelling of both rate-independent and rate-dependent hysteresis in piezoelectric actuators

Adaptive Fuzzy Hysteresis Internal Model Tracking Control of Piezoelectric Actuators With Nanoscale Application

Design and Assessment of a 6-DOF Micro/Nanopositioning System

Two-degree of freedom translation parallel decoupling micromotion platform

Dynamic linear modeling, identification and precise control of a walking piezo-actuated stage