scispace - formally typeset
R

R. Spolaczyk

Publications -  6
Citations -  977

R. Spolaczyk is an academic researcher. The author has contributed to research in topics: Interferometry & Fizeau interferometer. The author has an hindex of 6, co-authored 6 publications receiving 953 citations.

Papers
More filters
Journal ArticleDOI

Digital wave-front measuring interferometry: some systematic error sources.

TL;DR: To study the occurrence of wave-front irregularities caused by dust particles a model has been developed and countermeasures derived which assure sufficient regularity of contour line plots, and the repeatability of the present experimental setup was better than λ/200 within the 3σ limits.
Journal ArticleDOI

Absolute sphericity measurement

TL;DR: Several conventional methods for absolute sphericity testing of optical surfaces are reviewed and assessed for suitability in real time interferometry and a special subsequent digital spatial filtering technique for diminution of noise is described.
Journal ArticleDOI

Homogeneity testing by phase sampling interferometry.

TL;DR: The Twyman-Perry method for the evaluation of refractive-index deviations from uniformity—further developed by Roberts and Langenbeck—has been programmed for a digital Twy-man-Green interferometer and the variations of the refractive index apart from a linear slope can be measured and displayed.
Journal ArticleDOI

Semiconductor wafer and technical flat planeness testing interferometer

TL;DR: In this article, an interferometer for planeness testing of technical surfaces is described and real-time interferometric evaluations of 10-cm (4-in.) diam silicon wafers are carried out.
Journal ArticleDOI

Semiconductor wafer and technical flat planeness testing interferometer

TL;DR: An interferometer for planeness testing of technical surfaces is described and real-time interferometric evaluations of 4 in silicon wafers have been carried out.