R
Robert D. Allen
Researcher at IBM
Publications - 176
Citations - 3309
Robert D. Allen is an academic researcher from IBM. The author has contributed to research in topics: Resist & Photoresist. The author has an hindex of 32, co-authored 176 publications receiving 3244 citations.
Papers
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Journal ArticleDOI
Preparation of high purity, anionic polymerization grade alkyl methacrylate monomers
TL;DR: In this article, a method has been developed which provides very pure alkyl methacrylate monomers for anionic polymerization, taking advantage of the chemistry of trialkylaluminum compounds.
Journal ArticleDOI
Supercritical CO2 Processing for Submicron Imaging of Fluoropolymers
Narayan Sundararajan,Shu Yang,Kenji Ogino,Suresh Valiyaveettil,Jianguo Wang,Xinyi Zhou,Christopher K. Ober,S. K. Obendorf,Robert D. Allen +8 more
TL;DR: To keep pace with the evershrinking feature sizes required in the microelectronics industry, suitable developers with high diffusivities, selectivity, and adjustable solvating power are required as discussed by the authors.
Journal ArticleDOI
Bifunctional hydrogel coatings for water purification membranes: Improved fouling resistance and antimicrobial activity
Young Hye La,Bryan D. McCloskey,Ratnam Sooriyakumaran,Ankit Vora,Benny D. Freeman,Majed S. Nassar,James L. Hedrick,Alshakim Nelson,Robert D. Allen +8 more
TL;DR: In this article, the photopolymerization of polyethylene glycol diacrylate (PEGDA) and a functional monomer containing ammonium salt (RNH3Cl) in the presence of a photoinitiator was used to obtain high water uptake and high water permeability.
Patent
Process for generating negative tone resist images utilizing carbon dioxide critical fluid
TL;DR: In this paper, a negative tone resist image is generated by coating a substrate with a polymeric composition comprising a polymer, a photosensitive acid generator, and acid labile groups, and then exposing the film to radiation to generate free acid.
Journal ArticleDOI
Novel thin film composite membrane containing ionizable hydrophobes: pH-dependent reverse osmosis behavior and improved chlorine resistance
Young Hye La,Ratnam Sooriyakumaran,Dolores C. Miller,Masaki Fujiwara,Yoshiharu Terui,Kazuhiro Yamanaka,Bryan D. McCloskey,Benny D. Freeman,Robert D. Allen +8 more
TL;DR: In this paper, a polyamide thin film composite membranes were prepared by interfacial polymerization of hexafluoroalcohol (HFA)-containing aromatic diamine and trimesoyl chloride (TMC) on a porous polysulfone support.