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Robert D. Allen

Researcher at IBM

Publications -  176
Citations -  3309

Robert D. Allen is an academic researcher from IBM. The author has contributed to research in topics: Resist & Photoresist. The author has an hindex of 32, co-authored 176 publications receiving 3244 citations.

Papers
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Preparation of high purity, anionic polymerization grade alkyl methacrylate monomers

TL;DR: In this article, a method has been developed which provides very pure alkyl methacrylate monomers for anionic polymerization, taking advantage of the chemistry of trialkylaluminum compounds.
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Supercritical CO2 Processing for Submicron Imaging of Fluoropolymers

TL;DR: To keep pace with the evershrinking feature sizes required in the microelectronics industry, suitable developers with high diffusivities, selectivity, and adjustable solvating power are required as discussed by the authors.
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Bifunctional hydrogel coatings for water purification membranes: Improved fouling resistance and antimicrobial activity

TL;DR: In this article, the photopolymerization of polyethylene glycol diacrylate (PEGDA) and a functional monomer containing ammonium salt (RNH3Cl) in the presence of a photoinitiator was used to obtain high water uptake and high water permeability.
Patent

Process for generating negative tone resist images utilizing carbon dioxide critical fluid

TL;DR: In this paper, a negative tone resist image is generated by coating a substrate with a polymeric composition comprising a polymer, a photosensitive acid generator, and acid labile groups, and then exposing the film to radiation to generate free acid.
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Novel thin film composite membrane containing ionizable hydrophobes: pH-dependent reverse osmosis behavior and improved chlorine resistance

TL;DR: In this paper, a polyamide thin film composite membranes were prepared by interfacial polymerization of hexafluoroalcohol (HFA)-containing aromatic diamine and trimesoyl chloride (TMC) on a porous polysulfone support.