An object is to provide a semiconductor device of which a manufacturing process is not complicated and by which cost can be suppressed, by forming a thin film transistor using an oxide semiconductor film typified by zinc oxide, and a manufacturing method thereof. For the semiconductor device, a gate electrode is formed over a substrate; a gate insulating film is formed covering the gate electrode; an oxide semiconductor film is formed over the gate insulating film; and a first conductive film and a second conductive film are formed over the oxide semiconductor film. The oxide semiconductor film has at least a crystallized region in a channel region.

Semiconductor device, and manufacturing method thereof

Publisher Summary This chapter describes the self-imaging phenomenon and its applications. The self-imaging phenomenon requires a highly spatially coherent illumination. It disappears when the lateral dimensions of the light source are increased. When the source is made spatially periodic and is placed at the proper distance in front of the periodic structure, a fringe pattern is formed in the space behind the structure. The chapter discusses the theoretical and applicational aspects of the self-imaging phenomenon—that is, the property of the Fresnel diffraction field of some objects illuminated by a spatially coherent light beam. The applications of self-imaging are summarized in four main groups—namely, (1) image processing and synthesis, (2) technology of optical elements, (3) optical testing, and (4) optical metrology. The chapter describes the double diffraction systems using spatially incoherent illumination. The first periodic structure plays the role of a periodic source composed of a multiple of mutually incoherent slits. Depending on whether the periods of two periodic structures are equal, the Lau or the generalized Lau effect is discussed. Various applications of incoherent double-grating systems are described in the fields of optical testing, image processing, and optical metrology. After examining some cases of coherent and incoherent illumination, the general issue of spatial periodicities of optical fields and its relevance to the replication of partially coherent fields in space is discussed.

I The Self-Imaging Phenomenon and its Applications

Semiconductor chip assemblies incorporating flexible, sheet-like elements having terminals thereon overlying the front or rear face of the chip to provide a compact unit. The terminals on the sheet-like element are movable with respect to the chip, so as to compensate for thermal expansion. A resilient element such as a compliant layer interposed between the chip and terminals permits independent movement of the individual terminals toward the chip driving engagement with a test probe assembly so as to permit reliable engagement despite tolerances.

Semiconductor chip assemblies, methods of making same and components for same

Hybrid elements containing optical power with both diffractive (holographic) and refractive components are shown to be useful for obtaining arbitrary or, in special cases, achromatic dispersive characteristics. In one configuration a volume holographic element is coated on the surface of a crown glass lens, and by varying the power distributions among the refractive and holographic components while maintaining constant overall optical power the effective Abbe V numbers of the resultant hybrid element are shown to span all real numbers excepting a narrow interval around zero. In the achromat case (V number = ∞), both refractive and diffractive components are of the same sign resulting in much smaller glass curvatures than in all-refractive achromat doublets or apochromat triplets. The large separation between holographic partial dispersions and available glass partial dispersions is shown to lead to hybrid three-color achromats with greatly reduced glass curvatures. Applications are expected to include broadband achromatic objectives and chromatic aberration corrector plates in high performance optical systems. Such corrector plates may have any net power (including zero) while exhibiting effective V numbers that are positive or negative and that span a wide range, e.g., ±1 or ±1000. Further advantages include reducing the need for choosing high dispersion glasses, which may be costly and difficult to grind or polish. High diffraction efficiency and broad spectral bandwidths (in excess of 3000 A) are obtained in the holographic optical elements using single-element central-stop and cascaded element designs.

Hybrid diffractive-refractive lenses and achromats

Publisher Summary This chapter describes the techniques and applications of computer-generated holograms. “Computer-generated holograms,” “synthetic holograms,” and “computer holograms” are terms used to refer to a class of holograms that are produced as graphical output from a digital computer. Given a mathematical description of a wavefront or an object represented by an array of points, the computer can calculate the amplitude transmittance of the hologram and display the result on a CRT or plot it on paper. Using photoreduced copy of the graphical output from a computer as holograms is only one of the many things that distinguish computer generated holograms from conventional ones. The computer-generated holograms have their greatest potential in the area of interferometry. They have been shown to be useful in supplementing existing methods of optical testing. Laser beam scanning is another promising area for computer-generated holograms. Holographic grating scanners are in many ways better than other mechanical mirror scanners.

III Computer-Generated Holograms: Techniques and Applications

Method and apparatus are disclosed for mounting a flexible film semiconductor chip carrier on a second level electronic package. The resulting electronic packaging structure includes electrically conductive spacers, such as solder balls or solder coated copper balls, which electrically interconnect outer lead bonding pads on the flexible film semiconductor chip carrier and corresponding bonding pads on the second level electronic package, and which physically support the flexible film of the semiconductor chip carrier substantially in a plane above the surface of the second level electronic package. This electronic packaging structure is made using a special assembly fixture comprising a base plate, a pressure insert with a resilient member, and a top plate. The flexible film semiconductor chip carrier with the spacers attached thereto is placed over the resilient member of the pressure insert which is clamped together with the second level electronic package between the top and base plates. Then, this assembly is heated to reflow the solder of the spacers, and the assembly fixture is disassembled, leaving the flexible film semiconductor chip carrier mounted on the second level electronic package with the flexible film of the carrier having a planar geometry as desired. The spacers may be attached to the flexible film semiconductor chip carrier using a special template having a pattern of openings corresponding to the pattern of outer lead bonding pads on the flexible film semiconductor chip carrier.

Method and apparatus for mounting a flexible film semiconductor chip carrier on a circuitized substrate

This paper shows the requirements for the achromatization of an irradiance distribution which is a function of a space coordinate multiplied by wavelength raised to a power. The particular requirements for achromatic Fourier transformation are then presented. The theory is applied to the following problems: achromatization of Newton’s ring patterns and Fraunhofer diffraction patterns and frequency plane filtering of an object illuminated with a broadband light source. Experimental systems that perform these functions are presented.

Compensating optical systems. Part 3: achromatic fourier transformation.

A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

Fluid treatment apparatus and method

The primary chromatic aberrations of a reconstructed holographic image can be compensated by a dispersive lens placed at the quasi-achromatic (QA) point of a hologram. The conditions for obtaining this compensation are derived. Three experimental systems that employ this compensation are discussed. Two of these are in line and use either a zone plate lens or flint glass lens as the dispersive element centered at the QA point. In the third system, an off-axis hologram is followed by an off-axis zone plate lens positioned at the offset QA point.

Compensating optical systems. Part 1: broadband holographic reconstruction.

A new type of moire grating that can produce very narrow moire beat lines is presented. Each grating period contains a number of transparent or opaque lines of equal width. The sequence of transmission coefficients across the grating period is not periodic but is chosen to be a binary pseudo-random sequence. These sequences are commonly used in signal processing because of their sharply peaked autocorrelations. When used to encode a moire grating, they produce very narrow moire beat lines. Three experimental gratings are discussed, and a contouring measurement using the narrow beat lines is described.

Robert H. Katyl

Papers

Method and apparatus for mounting a flexible film semiconductor chip carrier on a circuitized substrate

Compensating optical systems. Part 3: achromatic fourier transformation.

Fluid treatment apparatus and method

Compensating optical systems. Part 1: broadband holographic reconstruction.

Moiré Screens Coded with Pseudo-Random Sequences