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Sanghoon Bae

Researcher at Pennsylvania State University

Publications -  25
Citations -  379

Sanghoon Bae is an academic researcher from Pennsylvania State University. The author has contributed to research in topics: Silicon & Electron cyclotron resonance. The author has an hindex of 9, co-authored 25 publications receiving 375 citations.

Papers
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Patent

Deposited thin films and their use in separation and sarcrificial layer applications

TL;DR: In this article, the authors use large surface to volume ratio materials for separation, release layer, and sacrificial material applications, and demonstrate using deposited column/void network materials as examples of large surface-to-volume ratio materials.
Patent

Deposited thin films and their use in detection, attachment, and bio-medical applications

TL;DR: In this paper, the use of deposited thin films for chemical or biological analysis is discussed, which relates to the application of these thin films in separation adherence and detection of chemical of biological samples.
Journal ArticleDOI

Characteristics of amorphous and polycrystalline silicon films deposited at 120 °C by electron cyclotron resonance plasma-enhanced chemical vapor deposition

TL;DR: Amorphous and polycrystalline silicon (poly-Si) films, deposited by an electron cyclotron resonance plasmaenhanced chemical vapor deposition system at 120°C, have been investigated as discussed by the authors.
Journal ArticleDOI

Characteristics of low-temperature silicon nitride (SiNx:H) using electron cyclotron resonance plasma

TL;DR: In this article, a 50°C silicon nitride (SiNx:H) thin film was used for electron cyclotron resonance plasma-enhanced chemical deposition (ECR PECVD) system.
Journal ArticleDOI

Nanocrystalline Si thin films with arrayed void-column network deposited by high density plasma

TL;DR: In this paper, high porosity nanocrystalline Si thin films have been deposited using a high density plasma approach at temperatures as low as 100 °C, where the porosity can be varied up to ∼90% by varying the deposition conditions.