S
Song Hu
Researcher at Chinese Academy of Sciences
Publications - 152
Citations - 959
Song Hu is an academic researcher from Chinese Academy of Sciences. The author has contributed to research in topics: Lithography & Grating. The author has an hindex of 14, co-authored 141 publications receiving 798 citations. Previous affiliations of Song Hu include The Institute of Optics.
Papers
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Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithography.
TL;DR: The computational analyses results show that the moiré fringes of the two extended gratings can be refined as a transformed fringe pattern of two standard 1D-gratings and are highly sensitive to relative shift of two gratings thus might be applicable in alignment of lithography or correlated fields.
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Novel Quadruple-Band Microwave Metamaterial Absorber
TL;DR: In this paper, a quadruple-band metamaterial absorber at microwave frequencies is presented, which is composed of delicate periodic patterned structures and a metallic background plane, which are separated by a dielectric substrate.
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The grain size effect of the Pb(Zr0.45Ti0.55)O3 thin films deposited on LaNiO3-coated silicon by modified sol–gel process
TL;DR: In this paper, the growth mechanism of PZT thin films with high (1/0/0) orientation and the effects of grain size on the dielectric and ferroelectric properties of the films are qualitatively discussed.
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Dose-Modulated Maskless Lithography for the Efficient Fabrication of Compound Eyes With Enlarged Field-of-View
TL;DR: In this paper, a method of dose-modulated maskless lithography (DMML) with high efficiency for the fabrication of a special compound-eyes array with enlarged field-of-view is proposed.
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Fabrication of micro-optics elements with arbitrary surface profiles based on one-step maskless grayscale lithography
TL;DR: The proposed method of compensating the nonlinear effect in maskless lithography can be directly used to control the grayscale levels of the DMD for fabricating the structure with an arbitrary surface profile.