Showing papers by "Stefan E. Schulz published in 1996"

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Journal Article•DOI•

Enhanced reliability of W-encapsulated AlSi-interconnections using selective W-CVD

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Stefan E. Schulz¹, J.-O. Weidner, W. Hasse•Institutions (1)

01 Nov 1996-Microelectronic Engineering

TL;DR: In this paper, a commercial cluster tool with a specially equipped selective W-CVD chamber and a high vacuum load lock was used for the deposition of Al-alloy lines.

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