Three-dimensional (3D) imaging sensors allow machines to perceive, map and interact with the surrounding world1. The size of light detection and ranging (LiDAR) devices is often limited by mechanical scanners. Focal plane array-based 3D sensors are promising candidates for solid-state LiDARs because they allow electronic scanning without mechanical moving parts. However, their resolutions have been limited to 512 pixels or smaller2. In this paper, we report on a 16,384-pixel LiDAR with a wide field of view (FoV, 70° × 70°), a fine addressing resolution (0.6° × 0.6°), a narrow beam divergence (0.050° × 0.049°) and a random-access beam addressing with sub-MHz operation speed. The 128 × 128-element focal plane switch array (FPSA) of grating antennas and microelectromechanical systems (MEMS)-actuated optical switches are monolithically integrated on a 10 × 11-mm2 silicon photonic chip, where a 128 × 96 subarray is wire bonded and tested in experiments. 3D imaging with a distance resolution of 1.7 cm is achieved with frequency-modulated continuous-wave (FMCW) ranging in monostatic configuration. The FPSA can be mass-produced in complementary metal-oxide-semiconductor (CMOS) foundries, which will allow ubiquitous 3D sensors for use in autonomous cars, drones, robots and smartphones. 

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A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Ultra-low energy programmable non-volatile silicon photonics based on phase-change materials with graphene heaters

Integrated optical phased arrays can be used for beam shaping and steering with a small footprint, lightweight, high mechanical stability, low price, and high-yield, benefiting from the mature CMOS-compatible fabrication. This paper reviews the development of integrated optical phased arrays in recent years. The principles, building blocks, and configurations of integrated optical phased arrays for beam forming and steering are presented. Various material platforms can be used to build integrated optical phased arrays, e.g., silicon photonics platforms, III/V platforms, and III–V/silicon hybrid platforms. Integrated optical phased arrays can be implemented in the visible, near-infrared, and mid-infrared spectral ranges. The main performance parameters, such as field of view, beamwidth, sidelobe suppression, modulation speed, power consumption, scalability, and so on, are discussed in detail. Some of the typical applications of integrated optical phased arrays, such as free-space communication, light detection and ranging, imaging, and biological sensing, are shown, with future perspectives provided at the end.

Integrated Optical Phased Arrays for Beam Forming and Steering

Optical phased array (OPA) technology is considered a promising solution for solid-state beam steering to supersede the traditional mechanical beam steering. As a key component of the LIDAR system for long-range detection, OPAs featuring a wide steering angle and high resolution without beam aliasing are highly desired. However, a wide steering range requires a waveguide pitch less than half of the wavelength, which is easily subjected to cross talk. Besides, high resolution requires a large aperture, and it is normally achieved by a high count number of waveguides, which complicates the control system. To solve the mentioned issues, we design two high-performance 128-channel OPAs fabricated on a multilayered SiN-on-SOI platform. Attributed to the nonuniform antenna pitch, only 128 waveguides are used to achieve a 4 mm wide aperture. Besides, by virtue of innovative dual-level silicon nitride (Si3N4) waveguide grating antennas, the fishbone antenna OPA achieves a 100°×19.4° field of view (FOV) with divergence of 0.021°×0.029°, and the chain antenna OPA realizes a 140°×19.23° FOV with divergence of 0.021°×0.1°. To our best knowledge, 140° is the widest lateral steering range in two-dimensional OPA, and 0.029° is the smallest longitudinal divergence. Finally, we embed the OPA into a frequency-modulated continuous-wave system to achieve 100 m distance measurement. The reflected signal from 100 m distance is well detected with 26 dBm input transmitter power, which proves that OPA serves as a promising candidate for transceiving optical signal in a LIDAR system.

Wide-steering-angle high-resolution optical phased array

Frequency modulated continuous wave laser ranging (FMCW LiDAR) enables distance mapping with simultaneous position and velocity information, is immune to stray light, can achieve long range, operate in the eye-safe region of 1550 nm and achieve high sensitivity. Despite its advantages, it is compounded by the simultaneous requirement of both narrow linewidth low noise lasers that can be precisely chirped. While integrated silicon-based lasers, compatible with wafer scale manufacturing in large volumes at low cost, have experienced major advances and are now employed on a commercial scale in data centers, and impressive progress has led to integrated lasers with (ultra) narrow sub-100 Hz-level intrinsic linewidth based on optical feedback from photonic circuits, these lasers presently lack fast nonthermal tuning, i.e. frequency agility as required for coherent ranging. Here, we demonstrate a hybrid photonic integrated laser that exhibits very narrow intrinsic linewidth of 25 Hz while offering linear, hysteresis-free, and mode-hop-free-tuning beyond 1 GHz with up to megahertz actuation bandwidth constituting 1.6 × 1015 Hz/s tuning speed. Our approach uses foundry-based technologies - ultralow-loss (1 dB/m) Si3N4 photonic microresonators, combined with aluminium nitride (AlN) or lead zirconium titanate (PZT) microelectromechanical systems (MEMS) based stress-optic actuation. Electrically driven low-phase-noise lasing is attained by self-injection locking of an Indium Phosphide (InP) laser chip and only limited by fundamental thermo-refractive noise at mid-range offsets. By utilizing difference-drive and apodization of the photonic chip to suppress mechanical vibrations of the chip, a flat actuation response up to 10 MHz is achieved. We leverage this capability to demonstrate a compact coherent LiDAR engine that can generate up to 800 kHz FMCW triangular optical chirp signals, requiring neither any active linearization nor predistortion compensation, and perform a 10 m optical ranging experiment, with a resolution of 12.5 cm. Our results constitute a photonic integrated laser system for scenarios where high compactness, fast frequency actuation, and high spectral purity are required. 

/pdf/low-noise-frequency-agile-photonic-integrated-lasers-for-3h0uvluv.pdf

Low-noise frequency-agile photonic integrated lasers for coherent ranging

Accurate three-dimensional (3D) imaging is essential for machines to map and interact with the physical world1,2 Although numerous 3D imaging technologies exist, each addressing niche applications with varying degrees of success, none has achieved the breadth of applicability and impact that digital image sensors have in the two-dimensional imaging world3–10 A large-scale two-dimensional array of coherent detector pixels operating as a light detection and ranging system could serve as a universal 3D imaging platform Such a system would offer high depth accuracy and immunity to interference from sunlight, as well as the ability to measure the velocity of moving objects directly11 Owing to difficulties in providing electrical and photonic connections to every pixel, previous systems have been restricted to fewer than 20 pixels12–15 Here we demonstrate the operation of a large-scale coherent detector array, consisting of 512 pixels, in a 3D imaging system Leveraging recent advances in the monolithic integration of photonic and electronic circuits, a dense array of optical heterodyne detectors is combined with an integrated electronic readout architecture, enabling straightforward scaling to arbitrarily large arrays Two-axis solid-state beam steering eliminates any trade-off between field of view and range Operating at the quantum noise limit16,17, our system achieves an accuracy of 31 millimetres at a distance of 75 metres when using only 4 milliwatts of light, an order of magnitude more accurate than existing solid-state systems at such ranges Future reductions of pixel size using state-of-the-art components could yield resolutions in excess of 20 megapixels for arrays the size of a consumer camera sensor This result paves the way for the development and proliferation of low-cost, compact and high-performance 3D imaging cameras that could be used in applications from robotics and autonomous navigation to augmented reality and healthcare A compact, high-performance silicon photonics-based light detection and ranging system for three-dimensional imaging is developed that should be amenable to low-cost mass manufacturing

A universal 3D imaging sensor on a silicon photonics platform

Accurate 3D imaging is essential for machines to map and interact with the physical world. While numerous 3D imaging technologies exist, each addressing niche applications with varying degrees of success, none have achieved the breadth of applicability and impact that digital image sensors have achieved in the 2D imaging world. A large-scale two-dimensional array of coherent detector pixels operating as a light detection and ranging (LiDAR) system could serve as a universal 3D imaging platform. Such a system would offer high depth accuracy and immunity to interference from sunlight, as well as the ability to directly measure the velocity of moving objects. However, due to difficulties in providing electrical and photonic connections to every pixel, previous systems have been restricted to fewer than 20 pixels. Here, we demonstrate the first large-scale coherent detector array consisting of 512 ($32 \times 16$) pixels, and its operation in a 3D imaging system. Leveraging recent advances in the monolithic integration of photonic and electronic circuits, a dense array of optical heterodyne detectors is combined with an integrated electronic readout architecture, enabling straightforward scaling to arbitrarily large arrays. Meanwhile, two-axis solid-state beam steering eliminates any tradeoff between field of view and range. Operating at the quantum noise limit, our system achieves an accuracy of $3.1~\mathrm{mm}$ at a distance of 75 metres using only $4~\mathrm{mW}$ of light, an order of magnitude more accurate than existing solid-state systems at such ranges. Future reductions of pixel size using state-of-the-art components could yield resolutions in excess of 20 megapixels for arrays the size of a consumer camera sensor. This result paves the way for the development and proliferation of low cost, compact, and high performance 3D imaging cameras.

Solid state beam steering devices are key elements in low cost, robust, three-dimensional imaging systems. Here we present a silicon photonic beam steering device based upon an 8 x 8 grating coupler focal plane array approach fed by a thermo-optic Mach Zehnder switching tree. In this device transmission of the light from the grating couplers is made through the back side of the chip using topside mirrors allowing for both high efficiency out coupling and direct flip-chip integration of drive electronics, providing a path to scale to denser focal plane arrays with large numbers of points in the future. -13.8dB fibre-to-fibre transmission was achieved in our preliminary test around 1523 nm for the beam steering chip.

Silicon photonic beam steering module with backside coupling elements towards dense heterogeneous integration with drive electronics

Accurate 3D imaging is essential for machines to map and interact with the physical world1,2. While numerous 3D imaging technologies exist, each addressing niche applications with varying degrees of success, none have achieved the breadth of applicability and impact that digital image sensors have achieved in the 2D imaging world3-10. A large-scale twodimensional array of coherent detector pixels operating as a light detection and ranging (LIDAR) system could serve as a universal 3D imaging platform. Such a system would other high depth accuracy and immunity to interference from sunlight, as well as the ability to directly measure the velocity of moving objects11. However, due to difficulties in providing electrical and photonic connections to every pixel, previous systems have been restricted to fewer than 20 pixels12-15. Here, we demonstrate the first large-scale coherent detector array consisting of 512 (32×16) pixels, and its operation in a 3D imaging system. Leveraging recent advances in the monolithic integration of photonic and electronic circuits, a dense array of optical heterodyne detectors is combined with an integrated electronic readout architecture, enabling straightforward scaling to arbitrarily large arrays. Meanwhile, two-axis solid-state beam steering eliminates any tradeoff between field of view and range. Operating at the quantum noise limit16,17, our system achieves an accuracy of 3.1 mm at a distance of 75 meters using only 4 mW of light, an order of magnitude more accurate than existing solid-state systems at such ranges. Future reductions of pixel size using state-of-the-art components could yield resolutions in excess of 20 megapixels for arrays the size of a consumer camera sensor. This result paves the way for the development and proliferation of low cost, compact, and high-performance 3D imaging cameras, enabling new applications from robotics and autonomous navigation to augmented reality and healthcare.

Steven A. Fortune

Papers

A universal 3D imaging sensor on a silicon photonics platform

A universal 3D imaging sensor on a silicon photonics platform

Silicon photonic beam steering module with backside coupling elements towards dense heterogeneous integration with drive electronics

3D imaging via silicon-photonics-based LIDAR