Showing papers by "Sung-min Kim published in 2009"

Semiconductor device having bar type active pattern

Abstract: A semiconductor device having a bar type active pattern and a method of manufacturing the same are provided. The semiconductor device may include a semiconductor substrate having a semiconductor fin configured to protrude from a surface of the semiconductor substrate in a first direction, the semiconductor substrate having a first width and a second width crossing the first width, wherein the first width and the second width extend in a second direction. A plurality of active patterns may be arranged in the first direction with a separation gap from the semiconductor fin. A plurality of support patterns may be arranged between the semiconductor fin and one of the plurality of active patterns arranged closer to the semiconductor fin in the first direction, and between the plurality of active patterns arranged in the first direction to support the plurality of active patterns. A gate may be arranged to cross the plurality of active patterns in the second direction and to cover a portion of the at least one of the plurality of active patterns.

Method of fabricating a semiconductor device

Abstract: A method of fabricating a semiconductor device forms a micro-sized gate, and mitigates short channel effects. The method includes a pull-back process to form the gate on a substrate. The method also includes forming inner and outer spacers on the gate that are asymmetric to one another with respect to the gate, and using the spacers in forming junction regions in the substrate on opposite sides of the gate. In particular, the inner and outer spacers are formed on opposite sides of the gate so as to have different thicknesses at the bottom of the gate. The inner and outer junction regions are formed by doping the substrate before and after the spacers are formed. Thus, the inner and outer junction regions have extension regions under the inner and outer spacers, respectively, and the extension regions have different lengths.

Semiconductor device with FinFET and method of fabricating the same

Abstract: A FinFET semiconductor device has an active region formed of a semiconductor substrate and projecting from a surface of the substrate. A fin having a first projection and a second projection composed of the active region are arranged in parallel and at each side of a central trench formed in a central portion of the active region. Upper surfaces and side surfaces of the first projection and the second projection comprise a channel region. A channel ion implantation layer is provided at a bottom of the central trench and at a lower portion of the fin. A gate oxide layer is provided on the fin. A gate electrode is provided on the gate oxide layer. A source region and a drain region are provided in the active region at sides of the gate electrode. A method of forming such a device is also provided.

Finfet and manufacturing method thereof

Abstract: PROBLEM TO BE SOLVED: To provide a FinFET and a manufacturing method thereof SOLUTION: The pin FET includes: an active fin 102 provided on a substrate 100; a gate oxide film pattern 104 provided on the surface of the active fin 102; a first electrode pattern 106b which is provided on the gate oxide film pattern 104 and extended to cross the active fin 102; a second electrode pattern 108a which is attached on the first electrode pattern 106b, having a line width wider than the first electrode pattern 106b; and a source/drain expansion region 110 provided under the surface of the active fin 102 on both sides of the first electrode pattern 106b The FinFET like this has an excellent performance, with reduced GIDL current COPYRIGHT: (C)2009,JPO&INPIT

Methods of fabricating semiconductor devices with enlarged recessed gate electrodes

Abstract: A semiconductor device includes a semiconductor substrate having a recess therein. A gate insulator is disposed on the substrate in the recess. The device further includes a gate electrode including a first portion on the gate insulator in the recess and a second reduced-width portion extending from the first portion. A source/drain region is disposed in the substrate adjacent the recess. The recess may have a curved shape, e.g., may have hemispherical or ellipsoid shape. The source/drain region may include a lighter-doped portion adjoining the recess. Relate fabrication methods are also discussed.