Takayuki Fujita

TL;DR: In this paper, a vacuum-sealed vibrating gyroscope using silicon bulk micromachining technology is presented, which has an angular rate detection sensitivity of approximately 8.9 μV/(° s −1 ), a nonlinearity of 1.25% FS and a detection resolution of approximately 0.2° s−1 at 1 Hz BW.

TL;DR: In this article, the authors presented design methodology, fabrication process and characterization of a dual-axis MEMS galvano-mirror with double gimbal structure, where soft torsion beams are made of the photosensitive epoxy resin, SU-8, in order to obtain large deflection angle for small driving power.

TL;DR: In this paper, a double-gimbal structure was presented for angular rate detection in the parallel magnetic field, where the reference vibration of the inner gimbal is introduced by electromagnetic force from the inner-coil and displacement of the outer-gimbbal by the Coriolis force is detected by electromotive force at the outer coil.

TL;DR: In this paper, the authors describe the fabrication of MEMS-based electromagnetic energy harvesters for scavenging energy from the ambient vibration using a vibrator with embedded micro-magnets and a stator with integrated microcoils.

TL;DR: In this article, a PVDF-based cardiorespiratory sensor with independently optimized sensitivity to heartbeat and respiration is proposed, which comprises of a bending-sensitive unit and a bendinginsensitive unit.