Toshio Seki

TL;DR: Although the primary ion fluence exceeded the static SIMS limit, the molecular ion intensities from the polymer films remained constant, indicating that irradiation with large Ar cluster ion beams rarely leads to damage accumulation on the surface of the films, and this characteristic is excellently suitable for SIMS depth profiling of organic materials.

TL;DR: In this article, the authors proposed to use cluster ions that are much larger than the molecular ions as primary ions for organic secondary ion mass spectrometry, and they measured secondary ions for a thin arginine film target (200nm) bombarded with large Ar cluster ions using a time-of-flight technique.

TL;DR: The results prove the great potential of large gas cluster ion beams for molecular depth profiling of organic multilayer samples and the effect of temperature on the diffusion of these materials.

TL;DR: The fundamental principles and experimental status of gas cluster ion beam (GCIB) processing are described in this paper, and a review of the theoretical and experimental characteristics of new GCIB processes and related equipment development is presented.

TL;DR: A review of the theoretical and experimental characteristics of new gas cluster ion bombardment processes and related equipment development is presented in this article, where the fundamental principles and experimental status of GCIB processing are described as a new technique with promise for practical industrial applications.