T
Tzu-yu Wang
Researcher at TSMC
Publications - 1
Citations - 69
Tzu-yu Wang is an academic researcher from TSMC. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 1, co-authored 1 publications receiving 64 citations.
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Virtual Metrology Modeling for Plasma Etch Operations
Dekong Zeng,Costas J. Spanos,Yajing Tan,Tzu-yu Wang,Chun-Hsien Lin,Henry Lo,Jean Wang,Chen-Hua Yu +7 more
TL;DR: This work will use various statistical techniques to address challenges due to the nature of plasma data: high dimensionality, collinearity, overall non-linearity of system, variation of data structure due to equipment condition changing, etc.