Optical, crystallographic, and transport properties of nominally undoped n‐type and Zn doped p‐type Gax In1−xAs /InP (0.44<x<0.49) grown by liquid phase epitaxy (LPE), vapor phase epitaxy (VPE), and metal organic chemical vapor deposition (MOCVD) have been studied and related to the different growth methods. Samples grown by LPE show in general much larger luminescence intensities than the VPE samples with similar impurity concentration and less structural and compositional inhomogeneities. Peaks related to free and bound excitons and to different impurities are found in the photoluminescence and absorption spectra of the undoped samples. The binding energy of the exciton is determined to be 2.1±0.1 meV, in agreement with hydrogenic theory. A longitudinal optical (LO) phonon energy of 32±0.5 meV is derived from LO‐phonon replica of the exciton line. The dependence of the energy gap at T=2 K from the solid solution composition in the range xGa =45%–49% is determined yielding a bowing parameter of C=0.475 a...

Optical and crystallographic properties and impurity incorporation of GaxIn1−xAs (0.44<x<0.49) grown by liquid phase epitaxy, vapor phase epitaxy, and metal organic chemical vapor deposition

Improved performance of 1.5- mu m wavelength lasers and laser amplifiers using strained In/sub x/Ga/sub 1-x/As-InGaAsP quantum well devices is reported. The device structures fabricated to study the effects of strained quantum wells on their performance are described. These devices showed TM mode gain, demonstrating the strain-induced heavy-hole-light hole reversal in the valence band. Lasers using these tensile strained quantum wells show higher and narrower gain spectra and laser amplifiers have a higher differential gain compared to compressively strained quantum well devices. Consequently, the tensile strained quantum well lasers show the smallest linewidth enhancement factor alpha =1.5 (compression alpha =2.5) and the lowest K-factor of 0.22 ns (compression K=0.58 ns), resulting in an estimated intrinsic 3 dB modulation bandwidth of 40 GHz (compression 15 GHz). >

High-performance 1.5 mu m wavelength InGaAs-InGaAsP strained quantum well lasers and amplifiers

We present detailed analyses of x-ray double-crystal rocking curve measurements of superlattices. The technique measures depth profiles of structure factor, and profiles of perpendicular and parallel strains relative to the underlying substrate. In addition to providing a detailed picture of the state of stress, the profiles are a direct measure of the composition modulation. The thickness of the period of modulation and the average strain are determined with a precision of ~1%. The detailed structure of the period is determined to ~5%. We obtain an expression relating the structure of the rocking curve to the structure of the period. This expression allows analytic determination of the structure without Fourier transformation or computer fitting. We show the influence of small random fluctuations in layer thicknesses and strains. The technique is applied to a 15-period GaAlAs/GaAs and a ten-period AlSb/GaSb superlattice grown on GaAs and GaSb substrates, respectively. In the former, the thickness of the period was 676 A and the perpendicular strain varied between zero for the GaAs layer and 0.249% for the layer with peak (93%) Al concentration. Transition regions, ~100 A thick, with continuously varying composition, were found between the GaAs and the Ga0.07 Al0.93As layers. Fluctuations in structural properties were less than 5% of the average. The AlSb/GaSb superlattice had a period of 610 A with sharp transition regions between the layers and negligible fluctuations from period to period. The perpendicular strains were −0.03% and 1.25%, respectively, for the GaSb and AlSb layers. A uniform parallel strain of 0.03% was found throughout the superlattice. Nonzero parallel strain indicates that a small fraction of the misfit between the superlattice and the substrate is plastically accommodated by net edge dislocations lying in a narrow region (a few hundred A thick) at the interface with the substrate. The net number of edge dislocations was calculated to be ~1×10^4/cm^2. The measured perpendicular strains were in excellent agreement with the values calculated from bulk lattice parameters, elastic properties, and the parallel strain. For both superlattices, the standard deviation of random atomic displacements away from perfect crystal sites was below 0.1 A, in agreement with reported ion channeling and electron diffraction measurements of superlattices. The rocking curve method is a major tool for quantitative analysis of superlattices.

/pdf/x-ray-rocking-curve-analysis-of-superlattices-142i1hsv0v.pdf

X‐ray rocking curve analysis of superlattices

X-ray double-crystal diffractometry of Ga1−xAlxAs epitaxial layers

Residual stresses are found in the majority of multilayer thin film structures used in modem technology. The measurement and modeling of such stress fields and the elucidation of their effects on structural reliability and device operation have been a “growth area” in the literature, with contributions from authors in various scientific and engineering disciplines. In this article the measurement of the residual stresses in thin film structures with X-ray diffraction techniques is reviewed and the interpretation of such data and their relationship to mechanical reliability concerns are discussed.

W. Nijman

Papers

X-ray double-crystal diffractometry of Ga1−xAlxAs epitaxial layers

Asymmetry of misfit dislocations in heteroepitaxial layers on (001) GaAs substrates

High quality InGaAsPInP for multiple quantum well laser diodes grown by low-pressure OMVPE

Improved boat for multiple-bin liquid phase epitaxy

LPE growth of DH laser structures with the double source method