W
Warren W. Flack
Publications - 2
Citations - 250
Warren W. Flack is an academic researcher. The author has contributed to research in topics: Resist & Viscosity. The author has an hindex of 2, co-authored 2 publications receiving 238 citations.
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A mathematical model for spin coating of polymer resists
TL;DR: In this article, a mathematical model is derived to elucidate the dominant mechanisms governing film formation, which accurately describes the experimentally observed dependence of film thickness on the variables affecting the spin-coating process.
Journal ArticleDOI
In Situ Measurement of Resist Dissolution with a Psi‐Meter
TL;DR: Application d'un ellipsometre simplifie (psi-metre) a la mesure in situ de l'epaisseur de un film de resist dans des solutions de revelateur as mentioned in this paper.