Showing papers by "Xingcheng Xiao published in 2000"
TL;DR: In this article, the amorphous silicon carbonitride (SiC x N y ) films were prepared by radio frequency (RF) magnetron reactive sputtering using sintered SiC target.
99 citations
TL;DR: In this paper, the effect of substrate Si on the crystallization behaviors of amorphous CN x films is discussed and it is shown that heat-treatment over 1100°C could induce the partial transition from the amorphou state to the crystalline state of carbon nitride and obvious α-C 3 N 4 diffraction peaks appeared in the XRD spectrum of heat-treated samples at approximately 1180 and 1440°C.
11 citations
TL;DR: In this paper, the authors conducted a study on the thermal stability of a-CNx prepared by magnetron sputtering under the Ar atmosphere and showed that the decomposition process could be divided into two stages, one spans from room temperature (RT) to 800°C, during which the breakage of C-N bonds and the oxidation of C and N mainly accounts for the weight loss.
Abstract: The differential thermal analysis-thermogravimetry-mass spectroscopy (DTA-TG-MS) study on the thermal stability of CNx prepared by magnetron sputtering was carried out under Ar atmosphere The results show that the decomposition process could be divided into two stages One spans from room temperature (RT) to 800°C The nitrogen loss as well as the weight loss in the a-CNx could be attributed to the evaporation of C+(m/z=12), CN+(m/z=26), O2+(m/z=32), CO2+(m/z=44), NO2+(m/z=46), and C2N2+(m/z=52), as detected by mass spectroscopy The other is above 800°C, during which the breakage of C–N bonds and the oxidation of C and N mainly accounts for the weight loss The weight loss of a-CNx is 7% for the first stage and 428% for the second, suggesting the a-CNx to be more stable at low temperature
4 citations
TL;DR: In this paper, the powder diffraction pattern revealed that α-C3N4 is the main crystalline thermodynamically stable phase in the predicted crystalline carbon nitrides.
1 citations