ESCA (electron spectroscopy for chemical analysis) measurement results on thin SiO2/Si samples are examined comprehensively, critically, and in detail to show that it is possible to correlate these results with MOS (metal–oxide–semiconductor) device characteristics such as flatband (threshold) voltage, oxide breakdown field, mobile‐ion density, hole and electron trap density, and hot‐carrier lifetime. Up to now, much effort has been made to detect SiOx phases at SiO2/Si interfaces since they are thought to have a significant effect on MOS device characteristics. However, correlating the SiOx phases with device characteristics is difficult and involves overcoming two problems. First, the chemical state is difficult to determine exactly due to x‐ray irradiation effects. Second, the amount of defects and impurities which influence device characteristics is usually below the ESCA detection limit (1012–1013 cm−2) in device‐quality SiO2/Si samples. Investigation of the first problem led to the conclusion that i...

Electron spectroscopic analysis of the SiO2/Si system and correlation with metal–oxide–semiconductor device characteristics

Thin gate SiO 2 films thinner than 200 A often deteriorate throughout developmental VLSI processes, including refractory metal or silicide gates and ion- or plasma-assisted processes. Thermal nitridation of such SiO 2 films improves the MOS characteristics by producing surface protective layers against impurity penetration and by producing good interfacial characteristics. This fact indicates that a thermally grown silicon nitride film on a silicon substrate is the most promising candidate for a very-thin gate insulator. Experimental data show significant benefits from the nitride film for future VLSI devices.

Advantages of thermal nitride and nitroxide gate films in VLSI process

SiSiO2 interface characterization by ESCA

Atomic transport during growth of ultrathin dielectrics on silicon

A highly reliable nonvolatile memory device suitable for high-density electrically erasable and programmable read only memories (EEPROMs) is described. A metal-oxide-nitride-oxide-semiconductor (MONOS) structure whose top oxide is fabricated by chemical vapor deposition (CVD) on the nitride is proposed. This CVD oxide is densified by pyrogenic annealing and has stoichiometric SiO/sub 2/ characteristics. Its potential barrier, which prevents stored charges from decaying through the top oxide to the gate, thus becomes sharper than that of the thermally grown top oxide used in the conventional MONOS structure. For comparison between the proposed MONOS, conventional MONOS, and MNOS structures, three devices were fabricated on the same process line. The 16.7-nm nitride thickness in combination with a top oxide thickness of 4.0 nm results in a gate capacitance equivalent to that of the conventional NMOS structure with a 23.5-nm nitride thickness. Moreover, an asymmetric erase/write programming voltage has been adapted to the MONOS device operation by considering both erased-state degradation and written-state retention. At 85 degrees C, the proposed MONOS device has 10/sup 7/-cycle endurance with 10-year data retention. >

A novel MONOS nonvolatile memory device ensuring 10-year data retention after 10/sup 7/ erase/write cycles

Oxide growth kinetics of SiO2 films grown on silicon at 950 to 1100 °C in an O2/N2 mixture is empirically studied. It is found that a linear‐parabolic law is in excellent agreement with the oxidation data under the oxygen partial pressure PO2 of 1 or 10−1 atm. However, a parabolic law is obtained at 10−2 atm, and an inverse‐logarithmic law at 10−3 atm. The Mott‐Cabrera oxidation rate equation is adapted to the thermal oxidation of silicon in the case of PO2≲10−2 atm. Finally, 43.9 kcal/mole is derived as the activation energy value of silicon atoms entering into the oxide.

Y. Itoh

Papers

Thermal oxidation of silicon in various oxygen partial pressures diluted by nitrogen