This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

X-ray crystallography has been central to the development of many fields of science over the past century. It has now matured to a point that as long as good-quality crystals are available, their atomic structure can be routinely determined in three dimensions. However, many samples in physics, chemistry, materials science, nanoscience, geology, and biology are noncrystalline, and thus their three-dimensional structures are not accessible by traditional x-ray crystallography. Overcoming this hurdle has required the development of new coherent imaging methods to harness new coherent x-ray light sources. Here we review the revolutionary advances that are transforming x-ray sources and imaging in the 21st century.

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Beyond crystallography: Diffractive imaging using coherent x-ray light sources

Rechargeable batteries can effectively store electrical energy as chemical energy, and release it when needed, providing a good choice for applications in electric vehicles (EVs). Naturally, safety concerns are the key issue for the application of battery technology in EVs. Olivine LiFePO4 is considered to be the most promising cathode material for lithium-ion batteries due to its environmental friendliness, high cycling performance and safety characteristics. Some important breakthroughs in recent years have allowed its successful commercialization. However, in spite of its success, the commercial application of LiFePO4 batteries in EVs is still hindered by some technological obstacles. Herein, we provide an update on our previous review, and overview the most significant advances in the remaining challenges for this promising battery material. New research directions and future trends have also been discussed.

Olivine LiFePO4: the remaining challenges for future energy storage

The kinetics and uniformity of ion insertion reactions at the solid-liquid interface govern the rate capability and lifetime, respectively, of electrochemical devices such as Li-ion batteries. Using an operando x-ray microscopy platform that maps the dynamics of the Li composition and insertion rate in LixFePO4, we found that nanoscale spatial variations in rate and in composition control the lithiation pathway at the subparticle length scale. Specifically, spatial variations in the insertion rate constant lead to the formation of nonuniform domains, and the composition dependence of the rate constant amplifies nonuniformities during delithiation but suppresses them during lithiation, and moreover stabilizes the solid solution during lithiation. This coupling of lithium composition and surface reaction rates controls the kinetics and uniformity during electrochemical ion insertion.

Origin and hysteresis of lithium compositional spatiodynamics within battery primary particles

X-ray ptychographic microscopy combines the advantages of raster scanning X-ray microscopy with the more recently developed techniques of coherent diffraction imaging. It is limited neither by the fabricational challenges associated with X-ray optics nor by the requirements of isolated specimen preparation, and offers in principle wavelength-limited resolution, as well as stable access and solution to the phase problem. In this Review, we discuss the basic principles of X-ray ptychography and summarize the main milestones in the evolution of X-ray ptychographic microscopy and tomography over the past ten years, since its first demonstration with X-rays. We also highlight the potential for applications in the life and materials sciences, and discuss the latest advanced concepts and probable future developments.

X-ray ptychography

A soft X-ray ptychography approach can now image 5-nm-sized objects. Chemical component distributions in the delithiation of LiFePO4 nanoplates — a process relevant for energy storage — links structural defects to chemical phase propagation.

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Y. Shirley Meng

Papers

Chemical composition mapping with nanometre resolution by soft X-ray microscopy