With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

Development Trends and Perspectives of Future Sensors and MEMS/NEMS.

An ultra-wideband fiber optic acoustic sensor based on graphene diaphragm with a thickness of 10nm has been proposed and experimentally demonstrated. The two reflectors of the extrinsic Fabry-Perot interferometer is consist of fiber endface and graphene diaphragm, and the cavity is like a horn-shape. The radius of the effective area of the ultrathin graphene diaphragm is 1mm. Attributed to the strong van der Waals force between the diaphragm and the ceramic ferrule, the sensor head can be applied not only in the air but also underwater. Experimental results illustrate that ultra-wideband frequency response is from 5Hz to 0.8MHz, covering the range from infrasound to ultrasound. The noise-limited minimum detectable pressure level of 0.77Pa/Hz1/2@5Hz and 33.97μPa/Hz1/2@10kHz can be achieved, and the applied sound pressure is 114dB and 65.8dB, respectively. The fiber optic acoustic sensor may have a great potential in seismic wave monitoring, photoacoustic spectroscopy and photoacoustic imaging application due to its compact structure, simple manufacturing, and low cost.

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Ultrathin graphene diaphragm-based extrinsic Fabry-Perot interferometer for ultra-wideband fiber optic acoustic sensing.

A new scheme of fiber-optic cantilever enhanced resonant photoacoustic spectroscopy (CERPAS), combining high sensitive fiber-optic Fabry-Perot cantilever microphone with resonant photoacoustic spectroscopy, is presented for trace gas detection. A fiber-optic cantilever microphone with high sensitivity at the frequency near 1.4 kHz is designed to match with a first-order longitudinal resonant photoacoustic cell, whose resonant frequency is 1402 Hz. For sensitivity improvement, an erbium-doped fiber amplified near-infrared laser, with the central wavelength of 1532.83 nm and the maximum output power of 1 W, is used as the light source for acoustic excitation. The trace acetylene detection experiment demonstrates that, with the wavelength modulation spectrum and second-harmonic detection methods, the gas detection limit is achieved to be 80 ppt, which is at least one order of magnitude improvement compared with other photoacoustic acetylene sensors reported so far.

Ultra-high sensitive fiber-optic Fabry-Perot cantilever enhanced resonant photoacoustic spectroscopy

An all-optical photoacoustic spectroscopy based on lock-in white-light interferometry is proposed for trace gas detection. The cavity length of the fiber-optic Fabry–Perot cantilever microphone is demodulated by a high-speed white-light interferometer, whose spectral sampling is synchronously triggered by a phased locked signal. To improve the signal-to-noise ratio, the demodulated digital photoacoustic signal is further processed by a specially designed virtual lock-in amplifier. The designed photoacoustic spectrometer has been tested for trace acetylene (C2H2) detection in the near-infrared region. The normalized noise equivalent absorption coefficient for C2H2 is achieved to be 1.1×10−9  cm−1 W Hz−1/2.

Lock-in white-light-interferometry-based all-optical photoacoustic spectrometer.

This paper presents the development of a bioinspired multifunctional flexible optical sensor (BioMFOS) as an ultrasensitive tool for force (intensity and location) and orientation sensing. The sensor structure is bioinspired in orb webs, which are multifunctional devices for prey capturing and vibration transmission. The multifunctional feature of the structure is achieved by using transparent resins that present both mechanical and optical properties for structural integrity and strain/deflection transmission as well as the optical signal transmission properties with core/cladding configuration of a waveguide. In this case, photocurable and polydimethylsiloxane (PDMS) resins are used for the core and cladding, respectively. The optical transmission, tensile tests, and dynamic mechanical analysis are performed in the resins and show the possibility of light transmission at the visible wavelength range in conjunction with high flexibility and a dynamic range up to 150 Hz, suitable for wearable applications. The BioMFOS has small dimensions (around 2 cm) and lightweight (0.8 g), making it suitable for wearable application and clothing integration. Characterization tests are performed in the structure by means of applying forces at different locations of the structure. The results show an ultra-high sensitivity and resolution, where forces in the μN range can be detected and the location of the applied force can also be detected with a sub-millimeter spatial resolution. Then, the BioMFOS is tested on the orientation detection in 3D plane, where a correlation coefficient higher than 0.9 is obtained when compared with a gold-standard inertial measurement unit (IMU). Furthermore, the device also shows its capabilities on the movement analysis and classification in two protocols: finger position detection (with the BioMFOS positioned on the top of the hand) and trunk orientation assessment (with the sensor integrated on the clothing). In both cases, the sensor is able of classifying the movement, especially when analyzed in conjunction with preprocessing and clustering techniques. As another wearable application, the respiratory rate is successfully estimated with the BioMFOS integrated into the clothing. Thus, the proposed multifunctional device opens new avenues for novel bioinspired photonic devices and can be used in many applications of biomedical, biomechanics, and micro/nanotechnology. 

https://www.oejournal.org/data/article/export-pdf?id=61f3a30c99d881528090e6cd

Multifunctional flexible optical waveguide sensor: on the bioinspiration for ultrasensitive sensors development

We demonstrate a highly sensitive and stable fiber-optic Fabry–Perot cantilever microphone based on fast demodulated white-light interferometry. The cavity length of the low-finesse Fabry–Perot interferometry is absolutely measured by realizing a high-speed demodulation method utilizing a full spectrum, with the advantages of both high resolution and large dynamic range. An acoustic test demonstrates high sensitivities and linear responsivities at frequencies below 2 kHz. The pressure responsivity and the noise-limited minimum detectable acoustic pressure level are measured to be 211.2 nm/Pa and 5  μPa/Hz1/2, respectively, at the frequency of 1 kHz. Comparative experimental results show that the signal-to-noise ratio is over 10 times higher than a reference condenser microphone.

Fast demodulated white-light interferometry-based fiber-optic Fabry-Perot cantilever microphone.

We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 μPa/Hz1/2 at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.

High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressure Detections

A fiber-optic Fabry-Perot (F-P) accelerometer with high resolution, high dynamic range, high speed, and absolute measurement capability was developed and demonstrated in elevator health monitoring. The sensor element is based on a mesh diaphragm mass-loaded compact structure, and the F-P cavity interrogation was achieved by utilizing a high-speed white light interferometry demodulation algorithm. The displacement of inertial mass representing the change of F-P cavity was measured and translated to acceleration in real time. The results indicate a resonance frequency of 270 Hz and axial sensitivity of 3.86 μm/g within the frequency bandwidth of 10-120 Hz for the sensor. In experimental tests, the acceleration resolution achieved 8.5 μg within a ± 30 g maximum measurement range. The performance of the sensing system was compared with a commercialized piezoelectric accelerometer in monitoring the acceleration of an elevator.

Zhihao Zhao

Papers

Fast demodulated white-light interferometry-based fiber-optic Fabry-Perot cantilever microphone.

High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressure Detections

A Fiber-Optic Fabry-Perot Accelerometer Based on High-Speed White Light Interferometry Demodulation