Z
Zhong Zhang
Researcher at Tongji University
Publications - 144
Citations - 854
Zhong Zhang is an academic researcher from Tongji University. The author has contributed to research in topics: Sputter deposition & Extreme ultraviolet. The author has an hindex of 14, co-authored 142 publications receiving 689 citations.
Papers
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Journal ArticleDOI
Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet
Zhanshan Wang,Hongchang Wang,Jingtao Zhu,Zhong Zhang,Yao Xu,Shumin Zhang,Wenjuan Wu,Fengli Wang,Bei Wang,Liqin Liu,Lingyan Chen,Alan Michette,Slawka J. Pfauntsch,A. Keith Powell,Franz Schäfers,Andreas Gaupp,Mike MacDonald +16 more
TL;DR: In this paper, aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane.
Journal ArticleDOI
Complete polarization analysis of extreme ultraviolet radiation with a broadband phase retarder and analyzer
Zhanshan Wang,Hongchang Wang,Jingtao Zhu,Zhong Zhang,Fengli Wang,Yao Xu,Shumin Zhang,Wenjuan Wu,Lingyan Chen,Alan Michette,Slawka J. Pfauntsch,A. Keith Powell,Franz Schäfers,Andreas Gaupp,Mingqi Cui,Lijuan Sun,Mike MacDonald +16 more
TL;DR: In this paper, the polarization state of the BESSY UE56/1-PGM beamline radiation in the broad wavelength range of 12.7-15.5nm was measured using a molybdenum/silicon transmission phase retarder and a reflection analyzer with aperiodic multilayer interference structures, which can broaden the spectral response of these optical elements.
Journal ArticleDOI
Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17–19nm region
Qi Zhong,Wenbin Li,Zhong Zhang,Jingtao Zhu,Qiushi Huang,Haochuan Li,Zhanshan Wang,Philippe Jonnard,Karine Le Guen,Jean-Michel André,Hongjun Zhou,Tonglin Huo +11 more
TL;DR: A two-layer model is built up to fit situation of the AFM images, and simulate the grazing incident x-ray reflection-measurements of multilayers with various periods to represent the variable structure of the Al(1%wtSi)/Zr multilayer.
Journal ArticleDOI
Extreme ultraviolet broadband Mo/ Y multilayer analyzers
Zhanshan Wang,Hongchang Wang,Jingtao Zhu,Yao Xu,Shumin Zhang,Cunxia Li,Fengli Wang,Zhong Zhang,Yongrong Wu,Xinbin Cheng,Lingyan Chen,Alan Michette,Slawka J. Pfauntsch,A. Keith Powell,Franz Schäfers,Andreas Gaupp,Mike MacDonald +16 more
TL;DR: In this paper, a multilayer analyzer was made using direct current magnetron sputtering and characterized using the soft x-ray polarimeter at BESSY-II facility.