Journal ArticleDOI
A study on the characterization of high nickel alloy micro-holes using micro-EDM and their applications
TLDR
In this article, the feasibility of fabricating micro-holes in the high nickel alloy using micro-electro-discharge machining (micro-EDM) was investigated.About:
This article is published in Journal of Materials Processing Technology.The article was published on 2005-12-01. It has received 123 citations till now. The article focuses on the topics: Machining & Cutting tool.read more
Citations
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Book ChapterDOI
A Multiobjective Genetic-Algorithm-Based Optimization of Micro-Electrical Discharge Drilling: Enhanced Quality Micro-Hole Fabrication in Inconel 718
TL;DR: In this paper, a multiobjective genetic algorithm-based optimization of micro-electrical discharge machining (μ-EDM) of Inconel 718 superalloy was proposed.
Journal ArticleDOI
A novel ultrasonic vibration-assisted micro-EDM method to improve debris removal performance using relative three-dimensional ultrasonic vibration (RTDUV)
Book ChapterDOI
Modelling of Material Removal Rate in Micro-EDM of Inconel 600 Using Dimensional Analysis
TL;DR: In this article , a semi-empirical model is developed for predicting the material removal rate in micro-EDM using dimensional analysis, which is based on thermo-physical properties of Inconel 600 alloy material such as electrical conductivity, thermal conductivities, density, specific heat, and melting point.
References
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Journal ArticleDOI
Wire Electro-Discharge Grinding for Micro-Machining
TL;DR: In this paper, a new method, WEDG (wire electro-discharge grinding), for EDM'ing very thin rods is proposed, where travelling wire is used as the tool electrode.
Journal ArticleDOI
Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
W. Ehrfeld,H. Lehr +1 more
TL;DR: In this paper, a detailed description of deep X-ray lithography and an overview of the variety of microstructure products fabricated using the LIGA technique has been presented, including sensors, actuators, micromechanical components, microoptical systems, electrical and optical microconnectors.
Journal ArticleDOI
Drilling of Deep Microholes by EDM
TL;DR: In this paper, an experimental study on the machining of deep microholes by EDM is presented, which is based on a horizontal EDM using water as the dielectric, the electrode being formed by the WEDG method, the result shows the applicability of this technique to the industrial production of microholes with the depth ten times the diameter which ranges down to 50μm.
Journal ArticleDOI
Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory
TL;DR: In this article, the main objective of the proposed research is the development of a production technology for three-dimensional micromechanical structures together with a study of the mechanical properties of these structures.
Journal ArticleDOI
Micro ultrasonic machining and its applications in MEMS
TL;DR: In this paper, a combined machining method, micro ultrasonic machining (micro-USM), is proposed for the fabrication of three-dimensional (3D) microstructures with high aspect ratios.