Patent
Cathodoluminescence detector utilizing a hollow tube for directing light radiation from the sample to the detector
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TLDR
In this article, an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope are described, and a vacuum window is seated at the outer end of the tube directly ahead of a receiver.Abstract:
A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.read more
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Sample measuring device
TL;DR: In this article, the authors proposed a sample measuring device to measure light generated from a sample W by irradiating electron beams EB on the sample W, and a light collecting mirror part 31 that is arranged between the electron optical column part 23 and the sample X and that has an energy beam path 312 to pass the electron beam EB converged by the electron Optical Column Part 23 and to irradiate the electron particle beam EB on X and a mirror face 311 whose focal point F is set on an axis of the energybeam path 312 and that collects the light L generated from the sample
Patent
Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
TL;DR: In this paper, a parabolic reflector and an inclined planar light reflector are integrated with a set of photo-sensitive solid-state detector cells mounted in quadrature on a supporting plate, and supported by an electron microscope vacuum chamber specimen stage adaptor unit.
Patent
Adjustable cathodoluminescence detection system and microscope employing such a system
TL;DR: In this article, a cathodoluminescence detection system consisting of a collecting optic (112) collecting light radiation (108) from a sample illuminated by a beam of charged particles and reflecting it onto analysis means is described.
Patent
Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping
TL;DR: In this article, a semi-ellipsoidal mirror of high ellipticity directs emitted radiation from the device under test through an aperture to a radiation guide, which transmits the radiation to spectral analyzer.
Patent
High efficiency cathodoluminescence detector with high discrimination against backscattered electrons
TL;DR: In this article, a parabolic light reflection device in a cathodoluminescence (CL) apparatus is integrated with a photosensitive solid state device mounted on a supporting plate, and supported in an electron microscope vacuum chamber specimen stage by an adaptor element.
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Patent
Dual collector optical flaw detector
Lee K. Galbraith,Karel Urbanek +1 more
TL;DR: In this article, a flaw detector for optically transmissive surfaces having a first light collector above the surface and a second light collector below the surface is presented. But it is not shown in detail.
Patent
Rotatable support for selectively aligning a window with the channel of a probe
TL;DR: In this paper, a mechanism for selectively aligning one of two different radiation passing windows with the channel of a measuring device is described, where the probe is mounted on a spherical cap, having a diameter less than the diameter of the probe and is rotatable between a first and second position.
Patent
Cathodoluminescence device for scanning electron microscopes
Horl E,Mugschl E,Scholze Peter +2 more
TL;DR: A cathodoluminescence device for scanning electron microscopes which comprises a hollow space for arranging a specimen therein, and said hollow space having at least one focus and provided with a reflecting cover is described in this paper.
Patent
Electron beam detector
TL;DR: In this article, a scintillator part at the upper or lower part of the test sample on the electron beam path and also coating the fluorescent substance partially was used to enable high frequency scanning, observation of the heater substance, etc.
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Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture
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