Proceedings ArticleDOI
Large-aperture high-accuracy phase-shifting digital flat interferometer
Jinbang Chen,Dezhen Song,Rihong Zhu,Daojiong Chen,Qingyun Wang,Lei Chen,Yiguang Zhang +6 more
- Vol. 2003, pp 367-375
TLDR
In this article, a large-aperture high-accuracy phase-shifting digital flat interferometer which is a combination of optic, mechanics, electricity, and algorithm is described.Abstract:
This paper describes a large-aperture high-accuracy phase-shifting digital flat interferometer which is a combination of optic, mechanics, electricity, and algorithm. The aperture size is 250 mm and liquid surface is used as an absolute flat to eliminate systemic error. The accuracy is better than (lambda) /50 ((lambda) is Hz-Ne laser wavelength) (peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer will be used as our country optical flat standard instrument. This paper describes the optical interferometer, phase shifter, and calibration of precision.read more
Citations
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Journal ArticleDOI
Modelling and correction for polarization errors of a 600 mm aperture dynamic Fizeau interferometer
Miao Xinyu,Jun Ma,Yu Yifan,Jianxin Li,Cong Wei,Rihong Zhu,Lei Chen,Caojin Yuan,Qing Wang,Donghui Zheng +9 more
TL;DR: A wave plate model is developed for analyzing the birefringence effect and the relationship between the calculated phase and the ideal phase distribution is established, which can effectively eliminate single and double frequency print through errors.
Journal ArticleDOI
Optical phase-shifting methods based on low coherence laser for large aperture Fizeau interferometer
Miao Xinyu,Yu Yifan,Aobo Li,Jun Ma,Lei Chen,Jianxin Li,Qing Wang,Cong Wei,Rihong Zhu,Caojin Yuan +9 more
TL;DR: In this article, the phase shifting procedure is moved to the source module with a low coherence laser, which makes phase shifting independent of the large interference cavity, and the path matching procedure based on intensity variation is introduced to compensate the path difference between the two arms.
References
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Proceedings ArticleDOI
New algorithm on phase-shifting interferometry: the overlapping averaging 4-frame algorithm
TL;DR: This paper presents a new algorithm, the overlapping averaging 4-frame (OAF) algorithm, which can reduce the phase error due to phase shifter errors, which is more highly accurate than other phase-measurement algorithms.