Patent
Lorentz force motor direct drive inductive sensor calibration method and device
TLDR
In this article, a Lorentz force motor direct drive inductive sensor calibration method and device is presented, which takes a dual-frequency laser interferometer as a motion reference and adopts a piezoelectric ceramic displacement stage for micro motion positioning to compensate for a macro motion positioning error.Abstract:
The invention discloses a Lorentz force motor direct drive inductive sensor calibration method and device, and belongs to the technical field of precision measurement. The calibration method and device take a dual-frequency laser interferometer as a motion reference, a voice coil motor as a macro motion drive element, an air-floating guide rail as a macro motion guide element, and capacitive sensors and the dual-frequency laser interferometer as macro motion feedback elements for macro motion coarse positioning; and adopt a piezoelectric ceramic displacement stage for micro motion positioning to compensate for a macro motion positioning error. The four capacitive sensors are used to compensate the pitch and yaw errors of a macro motion positioning platform. According to the invention, the contradiction between the travel and precision of the calibration device of the displacement sensor can be effectively solved, and the dynamic and static calibration of the large-travel and high-precision inductive displacement sensor is realized.read more
Citations
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References
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Patent
Automated linear displacement sensor calibration device
TL;DR: In this paper, an automated linear displacement sensor calibration device consisting of a substrate, and dual linear guide rails, a grating ruler, a servo motor and a vertical lifting device which are fixed on the substrate is described.
Patent
A measurement configuration based on linear scales able to measure to a target also moving perpendicular to the measurement axis
TL;DR: In this article, a measurement concept based on linear scales is described, which combines the stability to environmental changes, typical for linear scales, with the ability to measure to a target that moves also in a direction perpendicular to the measurement axis.
Patent
Calibration device for capacitance displacement sensor
TL;DR: In this article, a calibration device for a capacitance displacement sensor with an interferometer mechanism and a calibration table base has been presented, which is used to improve the calibration precision of the sensor.
Journal ArticleDOI
A novel piezo vibration platform for probe dynamic performance calibration
TL;DR: In this article, a piezo tube is employed to generate movement which is measured in real time by a miniature fiber interferometer and close-loop controlled by a fast digital signal processor, thus the calibration can be made traceable to the national length standard.
Patent
Calibration device for plate condenser displacement sensor
TL;DR: In this paper, a calibration device for a plate condenser displacement sensor is presented, where a reference reflector is connected with the spectroscope and located on the same straight line as the optical axis of the single-axis laser interferometer.