Patent
Method of forming sputtering acticles by multidirectional deformation
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TLDR
In this paper, a method of producing a valve metal mill form having dimensions sufficient to be divided to form a plurality of sputter targets is described, which includes multidirectional deformation of an ingot to create a mill form with a preferred average grain size of about 100 microns or less.Abstract:
A method of producing a valve metal mill form having dimensions sufficient to be divided to form a plurality of sputter targets is described. The method includes multidirectional deformation of an ingot to form a mill form having a preferred average grain size of about 100 microns or less and/or a texture substantially void of textural bands.read more
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Target designs and related methods for coupled target assemblies, methods of production and uses thereof
TL;DR: In this paper, a sputtering target is described that comprises a target surface component comprising a surface material, a core backing component having a coupling surface, a back surface and at least one open area.
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Steel plate for refrigerator door and manufacturing method thereof
TL;DR: In this article, a steel plate for a refrigerator door and a method for manufacturing the steel plate are presented, which includes cutting a section from a rolled stainless steel plate base material corresponding in length to a length of a door, rotating the cut section by a 90°angle, and surface processing through grinding a surface of the cut sections in a direction perpendicular to a rolled direction thereof.
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Methods of producing deformed metal articles
TL;DR: In this article, a method of making metal articles as well as sputtering targets is described, which involves deforming an ingot to preferred dimensions, and products made by the process of the present invention are further described.
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Methods and apparatus for controlling texture of plates and sheets by tilt rolling
Dincer Bozkaya,Peter R. Jepson +1 more
TL;DR: In this paper, a rolling mill with a tilted feed table and an apron upon which a transfer table and a tiltable feed table can rest is used for rolling metal sheet or plate.
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Tantalum sputtering target and method of fabrication
TL;DR: In this paper, a process for processing metal is described, which includes clock rolling a metal plate until the desired thickness is achieved to form a rolled plate, and other metal articles are further described.
References
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High purity tantalum, products containing the same, and methods of making the same
TL;DR: In this paper, high purity tantalum metals and alloys containing the same properties are described and a process for making the high purity metal which includes the step of reacting a salt-containing tantalum with at least one compound capable of reducing this salt to tantalum powder and a second salt in a reaction container.
Patent
Method for controlling the oxygen content in valve metal materials
TL;DR: In this paper, the acid leach solution is prepared and cooled to a temperature lower than room temperature prior to leaching the deoxidized valve metal material, such as tantalum, niobium, or alloys thereof.
Patent
Tantalum sputtering target with fine grains and uniform texture and method of manufacture
TL;DR: In this article, a method for producing a tantalum sputtering component includes a minimum of three stages each of which includes a deformation step followed by an inert atmosphere high-temperature anneal.
Patent
Hollow cathode target and methods of making same
TL;DR: In this paper, the authors describe a method of cold-rolling a sputtering metal workpiece made of a valve metal to obtain a shape workpiece, which is then cold-rolled to obtain the sputtering target.
Patent
Refractory metal plates with uniform texture and methods of making the same
TL;DR: In this paper, a method of forming sputtering target from ingots of tantalum or niobium of requisite purity by the process of cutting the ingot to short lengths and pressure working (14, 22, 30, 34), along alternating essentially orthogonal work axes, is described.