Patent
Method of measuring thickness and refractive indices of component layers of laminated structure and measuring apparatus for carrying out the same
Yamaguchi Ichirou,Fukano Takashi +1 more
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TLDR
In this paper, a light beam emitted by a light source is projected through a collimator lens, a beam splitter and an objective on a sample having a laminated structure.Abstract:
A light beam emitted by a light source is projected through a collimator lens, a beam splitter and an objective on a sample having a laminated structure. The light beam reflected from the sample travels through the beam splitter to a detector and the detector provides a confocal signal. The detector provides an interference signal upon the reception of the reflected light beam and a reference light beam reflected by a reference mirror. The sample and the reference mirror are moved on the basis of the confocal signal and the interference signal, and the thickness and the refractive index of layer of the sample are determined on the basis of the respective displacements of the sample and the reference mirror.read more
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Patent
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References
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Method and apparatus for acquiring images using a ccd detector array and no transverse scanner
TL;DR: In this paper, an array detector such as a charge coupled device is used to acquire an at least one dimensional digital image of a region of an object using an optical source which outputs a first optical beam having a short coherence length.
Patent
A device for measuring the thickness of thin films
TL;DR: In this article, a thin film thickness measuring device is described, which consists of an illuminator, a receiver and a beam deflector, which is translatable along a scanning axis parallel to the input axis and directs the input light beam towards a sample and the output light beam from the sample towards the receiver.
Patent
Refractive index measurement of spectacle lenses
TL;DR: In this paper, the authors present an approach for measuring the index of refraction of glass such as spectacle lenses without measuring the surface geometry of the glass. But this approach requires the use of a source of a substantially spatially coherent beam of radiation, a beamplitter to provide a sample beam and a reference beam in response to the beam, a translatable retroreflector which reflects the reference beam, and a holder to hold the material in the path of the sample beam.