Patent
Microelectromechanical z-axis detection structure with low thermal drifts
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TLDR
In this paper, the first fixed-electrode arrangement is set on a substrate having a top surface, and a sensing mass, extending in a plane and suspended above the substrate, is used to detect a quantity along an axis orthogonal to the plane.Abstract:
A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.read more
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Microelectromechanical gyroscope with enhanced rejection of acceleration noises
TL;DR: In this article, an integrated microelectromechanical structure is provided with a driving mass, anchored to a substrate via elastic anchorage elements and designed to be actuated in a plane with the driving movement; and a first sensing mass and a second sensing mass, suspended within, and coupled to, the driving mass via respective elastic supporting elements so as to be fixed with respect to the angular velocity.
Patent
Micromachined gyroscope including a guided mass system
Joseph Seeger,Ozan Anac +1 more
TL;DR: In this article, a gyroscope is disclosed, consisting of a substrate and a guided mass system, and the guiding arm and the proof-mass are disposed in a plane parallel to the substrate.
Patent
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Patent
Capacitance detector for accelerometer and gyroscope and accelerometer and gyroscope with capacitance detector
TL;DR: In this article, a capacitance-to-frequency converter is proposed to convert a difference between first and second capacitances produced of a teeter-totter capacitive transducer as a result of a rotational force being applied to the transducers to a first signal having a first frequency that is a function of the rotational forces.
Patent
Printed Stretch Sensor
TL;DR: In this paper, a deformable nonconductive substrate and an imagewise pattern thereon of a conductive stretchable ink were described. But the structure of the pattern was not specified.
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Multiple-axis linear accelerometer
TL;DR: In this article, a three-axis accelerometer is provided for sensing acceleration in three orthogonal axes, which includes a support substrate, fixed electrodes having fixed capacitive plates fixed to the support substrate and a movable inertial mass having movable plates capacitively coupled to the fixed plates.
Patent
Multi-axis micromachined accelerometer and rate sensor
TL;DR: In this article, a multi-axis micromachined accelerometer and rate sensor having first and second generally planar masses disposed side-by-side and connected together along adjacent edge portions thereof is used for torsional movement about axes parallel to a first axis in response to acceleration along a second axis and for rotational motion about axis parallel to the second axis in reaction to acceleration on the first axis.
Patent
Transducer with decoupled sensing in mutually orthogonal directions
Yizhen Lin,Andrew C. McNeil +1 more
TL;DR: In this paper, a microelectromechanical system (MEMS) transducer is adapted to sense acceleration in mutually orthogonal directions (92, 94, 96).
Patent
Micro-machined electromechanical system (MEMS) accelerometer device having arcuately shaped flexures
TL;DR: An apparatus and method for suspending a movable structure form a support structure wherein first and second flat and thin arcuately shaped flexures are formed having spaced apart substantially planar and parallel opposing surfaces as mentioned in this paper.
Patent
Sensor having free fall self-test capability and method therefor
Akihiro Ueda,Andrew C. McNeil +1 more
TL;DR: In this paper, a transducer consisting of a movable element (24), a self-test actuator (22), and a sensing element (56, 58) is used to detect the movement of a moving object from a first position to a second position along an axis perpendicular to a plane of the sensing element.