scispace - formally typeset
Proceedings ArticleDOI

Micromachined inset-fed patch antenna at Ka-band

Reads0
Chats0
TLDR
In this article, the design and fabrication of high performance Ka-band inset-fed micromachined patch antenna using post-CMOS compatible process technology is reported. But the main emphasis of this paper is to demonstrate use of RF sputtering as potential metal-dielectric films deposition-process for rapid prototyping of many antenna structures in the absence of access to a well-established MEMS foundry.
Abstract
In this paper, we report the design and fabrication of high performance Ka-band inset- fed micromachined patch antenna using post- CMOS compatible process technology. The main emphasis of this paper is to demonstrate use of RF sputtering as potential metal-dielectric films deposition-process for rapid prototyping of many antenna structures in the absence of access to a well- established MEMS foundry. The fabricated antenna resonated at 35 GHz with 3.14% impedance bandwidth.

read more

Citations
More filters
Proceedings Article

Novel linearly and circularly polarized 60 GHz MEMS antennas on low- and high-resistivity silicon

TL;DR: In this paper, two novel MEMS antennas for 60 GHz applications are introduced, where the first antenna is radiating linearly polarized wave, while circularly polarized wave can be radiated from the second antenna.
Proceedings ArticleDOI

60 GHz micromachined patch antenna for wireless applications

TL;DR: In this article, a microstrip-to-coplanar transition was used to achieve a 4.6 dBi gain in the return loss of the fabrication design, and the attained bandwidth was ∼3 GHz.
Proceedings ArticleDOI

Design and Development of Square and Circular Micromachined Patch Antennas at Ka-band

TL;DR: In this article, the design, development and fabrication of high performance Ka-band square and circular micromachined patch antenna using post-CMOS compatible process technology is reported.
Proceedings Article

Dual-band 60/77 GHz MEMS antenna on high-resistivity silicon

TL;DR: In this paper, a novel MEMS antenna with ground plane isolation from the driving circuits using one silicon wafer was proposed, which is capable of operating at both 60 GHz and 77 GHz.
Journal ArticleDOI

A Head/Taillight Featuring Hybrid Planar Visible Light Communications/Millimetre Wave Antenna for Vehicular Communications

TL;DR: The proposed hybrid planar antenna is suitable for example in a typical vehicle-to-vehicle communications and measured results for characterization of RF and VLC links as well as communications performance are shown.
References
More filters
Book

Microstrip Antenna Design Handbook

TL;DR: Feeding Techniques and Modeling, Design and Analysis of Microstrip Antenna Arrays: Parallel and Series Feed Systems, and Theory and Design of Active Integrated Micro Strip Antenna Amplifiers.
Journal ArticleDOI

Micromachined patch antennas

TL;DR: In this article, the authors used selective lateral etching based on micromachining techniques to enhance the performance of rectangular microstrip patch antennas printed on high-index wafers such as silicon, GaAs, and InP.
Related Papers (5)