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Journal ArticleDOI

Nonequilibrium volume plasma chemical processing

Baldur Eliasson, +1 more
- 01 Dec 1991 - 
- Vol. 19, Iss: 6, pp 1063-1077
TLDR
In this paper, a review of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges is presented, where the role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed.
Abstract
A review is presented of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges. The role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed. Different discharge types of (glow, corona, silent, RF, and microwave discharges) are investigated with respect to their suitability for plasma processing. Emphasis is placed on the requirements of initiating and maintaining the discharge and, at the same time, optimizing plasma parameters for the desired chemical process. Using large-scale industrial ozone production as an example, the detailed process of discharge optimization is described. Other applications of volume plasma processing include other plasma chemical syntheses as well as decomposition processes such as flue gas treatment and hazardous waste disposal. The author only deals with plasmas which are not in equilibrium. >

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Citations
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Dielectric-barrier Discharges: Their History, Discharge Physics, and Industrial Applications

TL;DR: In this article, the authors discuss the history, discharge physics, and plasma chemistry of dielectric-barrier discharges and their applications and discuss the applications of these discharges.
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The atmospheric-pressure plasma jet: a review and comparison to other plasma sources

TL;DR: In this paper, the physics and chemistry of the plasma jet and other atmospheric pressure sources are reviewed, including transferred arcs, plasma torches, corona discharges, and dielectric barrier discharges.
Journal ArticleDOI

Utilisation of CO2 as a chemical feedstock: opportunities and challenges

TL;DR: The utilization of CO(2) as a building block may represent an interesting approach to synthetic methodologies less intensive in carbon and energy.
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Dielectric Barrier Discharge Plasma Actuators for Flow Control

TL;DR: A particular type of plasma actuator that has gained wide use is based on a single-dielectric barrier discharge (SDBD) mechanism that has desirable features for use in air at atmospheric pressures as mentioned in this paper.
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Low Temperature Plasma-Based Sterilization: Overview and State-of-the-Art

TL;DR: Low temperature, high pressure, non-equilibrium plAsmas are now routinely used in several material processing applications, and in some cases are competing with low pressure plasmas in areas where these have historically been dominant.
References
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Journal ArticleDOI

Ozone synthesis from oxygen in dielectric barrier discharges

TL;DR: A comprehensive model of ozone generation in dielectric barrier discharges is presented in this paper, which combines the physical processes in the micro-discharges with the chemistry of ozone formation.
Journal ArticleDOI

Modeling and applications of silent discharge plasmas

TL;DR: In this paper, the nature of the silent discharge (dielectric barrier discharge) is reviewed and theoretical models for describing its discharge physics and ensuing plasma chemistry are presented, and the phenomena leading to gas breakdown in such electrode configurations at about atmospheric pressure are discussed.
Journal ArticleDOI

UV excimer radiation from dielectric-barrier discharges

TL;DR: In this paper, the molecular continuum of xenon at 172 nm was obtained with an efficiency of close to 10% and model calculations for excimer formation and UV efficiencies in such discharges were presented.
Journal ArticleDOI

Silent discharges for the generation of ultraviolet and vacuum ultraviolet excimer radiation

TL;DR: In this article, the potential of these new UV sources for industrial UV processing is demonstrated and large-area metal deposition induced by the 172 nm radiation from a silent discharge in xenon is shown.
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